Table Of ContentLecture Notes in Electrical Engineering 228
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Yuliang Zheng
Tunable Multiband
Ferroelectric Devices for
Reconfigurable RF-Frontends
ABC
Author
Dr.YuliangZheng
TUDarmstadt
Darmstadt
Germany
ISSN1876-1100 e-ISSN1876-1119
ISBN978-3-642-35779-4 e-ISBN978-3-642-35780-0
DOI10.1007/978-3-642-35780-0
SpringerHeidelbergNewYorkDordrechtLondon
LibraryofCongressControlNumber:2012954618
(cid:2)c Springer-VerlagBerlinHeidelberg2013
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Preface
Thisbookisa summaryanda preciousmemoryofmyresearchin theInstitute of
MicrowaveEngineeringandOpticsintheTechnischeUniversita¨tDarmstadt.
First of all I would like to express my gratitude to my supervisor Prof.
Dr.-Ing.Rolf Jakoby.Withouthis profoundadvise and warm encouragement,this
work would never have become a reality. My sincere appreciation goes also to
Prof.Dr.AndreasKleinforthegreatcooperationandhishelpfulguidancethrough-
outtheyears.
Fortheinspiringdiscussionsandconstructivecooperation,myfellowcolleagues
in the Institute of Microwave Engineering and Optics are warmly thanked. Espe-
cially,I deeplyappreciateDr.-Ing.Patrick Scheele,Dr.-Ing.AndreGiere,Mohsen
Sazegar, Dr.-Ing. Xianghui Zhou, Alexander Ga¨bler, Onur Hamza Karabey and
Dr.-Ing.HolgerMauneforthehelpwithnoreservationandthecordialfriendship,
Arshad Mehmood, Mohammad Nikfal Azar, Erick Gonza´lez Rodr´ıguez and Alex
Wiens for the fruitful teamwork. Without them, the endeavor would be a lonely
journey.
The interdisciplinary cooperations with the partners from the Department of
MaterialsScienceinTechnischeUniversita¨tDarmstadt,theInstituteofMicroelec-
tronic Systems in Technische Universita¨t Darmstadt, the Institute for Materials
Research in Karlsruhe Institute of Technology, the Department of Microsystems
Engineering in University of Freiburg, and EPCOS AG have enabled the work.
For bringingme a new horizonI wouldlike to acknowledgeProf.Dr.-Ing.Ju¨rgen
Haußelt,Dr.JoachimR.Binder,Prof.Dr.LambertAlff,Prof.Dr.Dr.h.c.mult.Man-
fred Glesner, Dr. Robert Schafranek, Dr. Shunyi Li, Karsten Rachut, Dr. Philipp
Komissinskiy, Stefan Hirsch, Dr.-Ing. Ping Zhao, Dr. Florian Paul, Henrik Elsen-
heimer,Dr.HolgerGesswein,Dr.StefanSeitz,andDr.AntonLeidl.
Finally I owe my greatest debts to my family. I thank my beloved parents for
life and the unfailing encouragement. I thank my sons, who remind me that the
explorationisabeautyofthelife.SpecialthankstomywifeDr.phil.YingCaifor
beingafantasticpartnerandwonderfulmother.
Abstract
Thisbookfocusesontheenablingferroelectricdevicetechnologyinreconfigurable
RF frontends for frequency-agile, software-defined and cognitive radios, which
are expected to cope with the demands of multiband and multi-standard opera-
tion. The ferroelectricdevicesare an emergingtechnologybased on the nonlinear
solid state ferroelectric materials. Such materials e.g. Barium-Strontium-Titanate
BaxSr1−xTiO3,ornamelyBST,exhibitavariablepermittivitydependentonexter-
nal electric field. The high permittivity, adequate tunability and dielectric loss as
well as low leakage currentallow the implementationin compact passive tunable
devices.BSTcanalsoberealizedinseveraltechnologiessuchasceramicthick-film
andcrystalthin-film,whichcanbeflexiblyadaptedtoapplications.
The investigation ranges from micro processing technologies to the develop-
mentofnoveldevices.Withininterdisciplinarycooperations,thematerialsaresyn-
thesized, processed and characterized. Micro processing technologies for device
realization are revised. Several novel devices are addressed. By introducing thin
conductivelayerinthemiddleoftwostackedBSTthin-films,theunavoidablegen-
erationofacousticresonanceduetotheelectrostrictionisconsiderablysuppressed.
When a highly resistive alumina oxide film is used to engineer the band gap on
theBSTsurface,theresultedcontrollableelectroninjectionleadstotheinnovative
programmable bi-stable high frequency capacitors. The kernel frontend parts, in-
cludingmultibandtunableantenna,tunablematchingnetworkandtunablesubstrate
integrated waveguide filter are addressed at the end. The challenging trend of an-
tennas towards compactness with wider spectrum coverage is coped with several
tunable resonant modes of the antennas with integrated BST varactors. A proto-
typeoptimizedforfrequencydivisionduplexservicescovers1.47 GHzto1.76GHz
with a variable distance from 38 MHz to 181MHz between up- and down-link
channels.Theenvironmentalimpactandfrequencydependenceofantennascanbe
compensatedbytunablematchingnetworks.Thisworkdemonstratesanintegrated
ferroelectric thick-film tunable matching network covering 1.8 GHz to 2.1GHz.
Itexhibitsaninsertionlossbetween0.86dBand0.98dB,ina3mm×3mmmul-
tilayerpackage.Atlastacompactbandpassfilterisenabledbyanevanescentmode
substrate integrated waveguide cavity in ferroelectric ceramics, integrated with
VIII Abstract
tunable complementary split ring resonator scatterers and tunable matching net-
works. A compact demonstrator covers 2.95GHz to 3.57GHz with a 3 dB frac-
tional bandwidth of up to 5.4% and a comparatively low insertion loss between
3.3 dBand2.6 dB.
Contents
1 Introduction.................................................. 1
2 TunableMicrowaveDielectrics ................................. 3
2.1 DielectricProperties ....................................... 3
2.2 Pyroelectricity ............................................ 5
2.3 Ferroelectricity ........................................... 6
2.4 PiezoelectricityandElectrostriction .......................... 9
2.5 ElectrostaticProperties..................................... 11
3 ProcessingofFerroelectricFilmsandComponents................ 13
3.1 ProcessingofBSTThick-FilmComponents ................... 13
3.1.1 Screen-PrintedThick-FilmCeramics................... 13
3.1.2 PlanarCircuitryRealizationandReliability ............. 17
3.2 ProcessingofBSTThin-FilmComponents .................... 25
3.2.1 BST Thin-FilmbyRF SputteringandPulsedLaser
Deposition......................................... 25
3.2.2 RealizationofThin-FilmComponents.................. 28
3.3 CharacterizationandModelingofLossyVaractors.............. 31
4 NovelMultilayerComponentsonBSTThin-Films ................ 37
4.1 Acoustic-FreeBSTThin-FilmVaractor ....................... 37
4.1.1 AcousticProperties ................................. 38
4.1.2 ModelingofMultilayerAcousticResonator............. 43
4.1.3 SuppressionofAcousticResonances................... 46
4.2 ProgrammableBi-stableCapacitor ........................... 49
4.2.1 Non-volatileBi-stabilitybyInducedHysteresis .......... 50
4.2.2 Long-TermStability................................. 54
5 TunableMultibandFerroelectricDevices ........................ 55
5.1 TunableMultibandAntennas................................ 56
5.1.1 TheoreticalAnalysis:QFactor,Bandwidthand
Tunability ......................................... 57
X Contents
5.1.2 Nonlinear Model of Capacitively Loaded Planar
Inverted-FAntenna.................................. 66
5.1.3 SuppressionofHarmonicRadiationbyBSTThick-Film
Varactors .......................................... 76
5.1.4 IndependentlyTunableMultibandSlotAntenna.......... 79
5.1.5 IntegratedDuplexCeramicAntenna ................... 84
5.2 TunableSingle-BandImpedanceMatchingNetwork
forAntennas.............................................. 87
5.2.1 TheoreticalAnalysis:Single-BandDesignGuidelines..... 88
5.2.2 OptimalDesignwithLossyComponents ............... 97
5.2.3 AntennaBandwidthEnhancement..................... 100
5.2.4 SysteminPackageRealization........................ 104
5.2.5 EfficiencyofAdaptiveControl........................ 110
5.3 TunableMultibandMatchingNetwork........................ 116
5.3.1 PolynomialSynthesisMethodforImpedanceMatching ... 116
5.3.2 Polynomial Optimization for Component Loss
Compensation...................................... 121
5.3.3 ImpedanceMatchingRanges ......................... 124
5.3.4 ProofofConcept ................................... 127
5.4 TunableSubstrateIntegratedWaveguideBandpassFilter ........ 130
5.4.1 BandpassFilterDesign .............................. 131
5.4.2 Tunable Evanescent-Mode Substrate Integrated
WaveguideCavity................................... 132
5.4.3 TunableImpedanceMatchingNetwork................. 133
5.4.4 RealizationandMeasurement......................... 135
6 SummaryandOutlook ........................................ 137
A TechnologyParameters ....................................... 141
References........................................................ 143
Glossary
BGA =ballgridarray.
C-V =capacitance-voltage.
CPW =coplanarwaveguide.
CSRR =complementarysplit-ringresonator.
DAC =digitaltoanalogconverter.
DCS =digitalcellularsystem.
FBAR =filmbulkacousticwaveresonator.
FDD =frequencydivisionduplex.
FDTD =finite-differencetime-domainmethod.
FEM =finiteelementmethod.
GSG =ground-signal-ground.
GSM =globalsystemformobilecommunications.
HTCC =hightemperaturecofiredceramics.
IDC =interdigitalcapacitor.
ITO =indiumtinoxide.
LMS =leastmeansquares.
LTCC =lowtemperaturecofiredceramics.
MEMS =microelectromechanicalsystems.
MIM =metal-insulator-metal.
MOS =metal-oxide-semiconductor.
PCS =personalcommunicationsservice.
PIFA =planarinverted-Fantenna.
PLD =pulsedlaserdeposition.
PVD =physicalvapordeposition.
RF =radiofrequency.
RFID =radiofrequencyidentification.
RFT =realfrequencytechnique.
RHEED=reflectionhigh-energyelectrondiffraction.
SAW =surfaceacousticwaveresonator.
SDR =software-definedradio.
XII Glossary
SIP =system-in-package.
SIW =substrateintegratedwaveguide.
SMA =subminiatureversiona.
SoC =systemonchip.
SRR =split-ringresonator.
TMN =tunablematchingnetwork.
TPG =transducerpowergain.
TRP =totalradiatedpower.
UBM =underbumpmaterial.
UMTS =universalmobiletelecommunicationssystem.
VNA =vectornetworkanalyzer.
