Download Silicon Carbide Microel Ectromechanical Systems for Harsh Environments PDF Free - Full Version
Download Silicon Carbide Microel Ectromechanical Systems for Harsh Environments by Rebecca Cheung in PDF format completely FREE. No registration required, no payment needed. Get instant access to this valuable resource on PDFdrive.to!
About Silicon Carbide Microel Ectromechanical Systems for Harsh Environments
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
Detailed Information
| Author: | Rebecca Cheung |
|---|---|
| Publication Year: | 2006 |
| ISBN: | 9781860949098 |
| Pages: | 193 |
| Language: | English |
| File Size: | 8.528 |
| Format: | |
| Price: | FREE |
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