Table Of ContentSPRINGER BRIEFS IN APPLIED SCIENCES AND
TECHNOLOGY MANUFACTURING AND SURFACE ENGINEERING
Swagata Samanta
Pallab Banerji
Pranabendu Ganguly
Photonic
Waveguide
Components
on Silicon Substrate
Modeling and
Experiments
123
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Swagata Samanta Pallab Banerji
(cid:129) (cid:129)
Pranabendu Ganguly
Photonic Waveguide
Components on Silicon
Substrate
Modeling and Experiments
123
Swagata Samanta Pallab Banerji
University of Glasgow Indian Institute of Technology Kharagpur
Glasgow, UK Kharagpur, West Bengal, India
Pranabendu Ganguly
Indian Institute of Technology Kharagpur
Kharagpur, West Bengal, India
ISSN 2191-530X ISSN 2191-5318 (electronic)
SpringerBriefs inApplied SciencesandTechnology
ISSN 2365-8223 ISSN 2365-8231 (electronic)
Manufacturing andSurface Engineering
ISBN978-981-15-1310-7 ISBN978-981-15-1311-4 (eBook)
https://doi.org/10.1007/978-981-15-1311-4
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Dedicated to our parents and family
Preface
This monograph intends to provide a clear view of the theoretical and ongoing
experimental methods for the fabrication of silicon and SU-8 polymer waveguides
and some structures based on these waveguides for optical integrated circuit
applications. The work is intended for researchers, scientists, and fabrication
engineers working in the field of integrated optics, optical communications, laser
technology, and optical lithography for device manufacturing.
Alltheworkdiscussedinthismonographhasbeencarriedoutusingtheresearch
facilities of the Advanced Technology Development Centre (ATDC) and Central
Research Facility (CRF) of the Indian Institute of Technology Kharagpur
(IITKGP). The authors would like to acknowledge all the members of the centre
who have directly or indirectly supported in the completion of the work and
especially Prof. S. K. Lahiri for his thought-provoking ideas through discussion
sessions. A big thank to Prof. Sakellaris Mailis and Prof. Srinivas Talabattula for
their suggestions in improving the monograph content. The editors and publishers
ofrespectivejournalarticles(ElsevierGmbH,ElsevierB.V.,CambridgeUniversity
Press, and IOP Publishing Ltd.) are also highly acknowledged for granting
permission to reuse data content, figures, and tables.
Glasgow, UK Swagata Samanta
Kharagpur, India Pallab Banerji
Kharagpur, India Pranabendu Ganguly
vii
Contents
1 Introduction to Waveguides . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 Fundamentals and Background . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1.1 Rib and Wire Waveguides . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1.2 Micro-ring Resonator. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.3 Photonic Crystal Structure . . . . . . . . . . . . . . . . . . . . . . . . 5
1.1.4 Power Splitter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.2 Motivation and Objectives . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.3 Outline of the Book . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2 Theoretical Studies on Silicon and SU-8 Waveguides . . . . . . . . . . . . 13
2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
2.2 Design of Single-Mode Wire Waveguide. . . . . . . . . . . . . . . . . . . 13
2.3 Bending Loss Computation of Bent Wire. . . . . . . . . . . . . . . . . . . 20
2.4 Lateral Mode Profile Computation of Photonic Wire . . . . . . . . . . 21
2.5 Design Aspects of Wire Waveguide with Slanted Wall. . . . . . . . . 21
2.6 Design of Large Cross-Section Silicon Rib Waveguide. . . . . . . . . 22
2.7 Computed Results. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
2.8 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
3 Experimental Studies on SU-8 Wire Waveguides . . . . . . . . . . . . . . . 33
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
3.2 Fabrication and Characterization . . . . . . . . . . . . . . . . . . . . . . . . . 34
3.2.1 Fabrication by Laser Direct Writing Technique . . . . . . . . . 34
3.2.2 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.2.3 Fabrication by Focused Ion Beam Lithography . . . . . . . . . 45
3.2.4 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
3.3 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
ix
x Contents
4 Design and Development of Some SU-8 Wire Waveguide
Structures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
4.2 Optical Directional Couplers . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.2.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
4.2.2 Computed Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
4.2.3 Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
4.2.4 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
4.3 Micro-ring Resonator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
4.3.1 Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
4.3.2 Computed Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
4.3.3 Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
4.3.4 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
4.3.5 Discussions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
4.4 Photonic Crystal Structure on Waveguide . . . . . . . . . . . . . . . . . . 72
4.4.1 Design and Simulation. . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.4.2 Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
4.4.3 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
4.4.4 Discussions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
4.5 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
5 Design and Development of Polarization-Independent Power
Splitter Using Coupled Silicon Waveguides. . . . . . . . . . . . . . . . . . . . 81
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
5.2 Power Splitter Using Coupled Silicon Wire Waveguides. . . . . . . . 81
5.2.1 Design and Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
5.2.2 Computed Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.2.3 Discussions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
5.3 Power Splitter Using Coupled Silicon Rib Waveguides. . . . . . . . . 86
5.3.1 Design and Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
5.3.2 Computed Results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
5.3.3 Fabrication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
5.3.4 Characterization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
5.4 Conclusions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
6 Conclusions and Future Scope of Work . . . . . . . . . . . . . . . . . . . . . . 97
6.1 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.2 Contributions and Achievements . . . . . . . . . . . . . . . . . . . . . . . . . 97
6.3 Limitations of the Present Work and Scopes
of Future Research . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
About the Authors
Dr. Swagata Samanta received her Ph.D from the Advanced Technology
Development Centre (ATDC), Indian Institute of Technology Kharagpur
(IIT-KGP) in 2018. She continued her research as a postdoctoral fellow at the
Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science
(IISc)Bangalore.Presently,sheisapostdoctoralresearchassistantintheSchoolof
Engineering, University of Glasgow, Scotland, UK. Her research interests include
novel on-chip nanophotonic and nanoelectronic devices, integrated optics, VLSI
systems, image processing, and artificial intelligence.
Dr. Pallab Banerji obtained his Ph.D from Jadavpur University, Kolkata, India.
Presently, he is serving as a Professor and Head of the Materials Science Centre,
Indian Institute of Technology Kharagpur. His major research areas are low
dimensional semiconductors: structures and devices, photonics, thermoelectrics,
and compound semiconductors. He has published about 120 research papers in
international journals and guided more than 15 doctoral students.
Dr. Pranabendu Ganguly received his Ph.D in 2000 from the Indian Institute of
Technology Kharagpur in integrated optics. Currently, he is working as senior
scientific officer at the Advanced Technology Development Centre (ATDC), IIT
Kharagpur. His recent areas of interest include micro- and nano-photonic devices,
and guided wave optics. Dr. Ganguly has published 95 research papers in national
and international journals, and conference proceedings. He is a Fellow of the
Optical Society of India.
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