Table Of ContentSpringer Series in Surface Sciences 64
Olaf Stenzel
Miloslav Ohlídal Editors
Optical
Characterization
of Thin Solid Films
Springer Series in Surface Sciences
Volume 64
Series editors
Roberto Car, Princeton University, Princeton, NJ, USA
Gerhard Ertl, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Berlin, Germany
Hans-Joachim Freund, Fritz-Haber-Institut der Max-Planck-Gesellschaft, Berlin,
Germany
Hans Lüth, Peter Grünberg Institute, Forschungszentrum Jülich GmbH, Jülich,
Germany
Mario Agostino Rocca, Dipartimento di Fisica, Università degli Studi di Genova,
Genova, Italy
This series covers the whole spectrum of surface sciences, including structure and
dynamicsofcleanandadsorbate-coveredsurfaces,thinfilms,basicsurfaceeffects,
analytical methods and also the physics and chemistry of interfaces. Written by
leading researchers in the field, the books are intended primarily for researchers in
academia and industry and for graduate students.
More information about this series at http://www.springer.com/series/409
í
Olaf Stenzel Miloslav Ohl dal
(cid:129)
Editors
Optical Characterization
of Thin Solid Films
123
Editors
OlafStenzel MiloslavOhlídal
Abbe Schoolof Photonics Institute of Physical Engineering
Friedrich-Schiller-University Jena BrnoUniversity ofTechnology
Jena, Thüringen Brno
Germany Czech Republic
and
Fraunhofer Institut für AngewandteOptik
undFeinmechanik IOF
Jena
Germany
ISSN 0931-5195 ISSN 2198-4743 (electronic)
SpringerSeries inSurface Sciences
ISBN978-3-319-75324-9 ISBN978-3-319-75325-6 (eBook)
https://doi.org/10.1007/978-3-319-75325-6
LibraryofCongressControlNumber:2018931163
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Fluorite Crystal
Detail of a painting by Vera Andrianova Forwerk, a Bulgarian master student of
photonics at Abbe School of Photonics, Friedrich Schiller University Jena,
Germany. Printed with permission.
Fluorite is a naturally occurring crystalline modification of calcium fluoride, a
widely used optical material for applications as windows, lenses and thelike from
the middle infrared up to the vacuum ultraviolet spectral regions. See Sect. 8.2.2
for optical constants.
Foreword
Thepresentbookprovidesthereaderwithtop-notchreportsfromtheworkbenches
of renowned colleagues in the field of thin film characterization.
The field of thin films is an ever-expanding area with optical coatings repre-
senting the oldest, yet perhaps the fastest, still developing area among the various,
multidisciplinary applications of thin films.
Amostcurrentsnapshotofthevastexpanseandspeedbywhichthefieldofthin
films is moving is provided in this book.
Thin films are abundant in modern science and engineering owing to sophisti-
cated and continuously improved techniques for their preparation, their usefulness
in basic and applied research, and their suitability for mass production in a sheer
limitless variety of new and advancing device structures. Perhaps one of the most
intriguing peculiarities of thin films is inscribed within their optical properties,
whichdependinmostcomplexwaysonthestructuralarrangementsofmatterfrom
atomic to macroscopic scales.
Theauthorsinthisbookprovidethereaderwithasetofchapterstogainafast
foothold in understanding of the topics needed to engage in optical thin film
characterization at the present level of the state of the art.
Theelectromagneticspectrumoffersabroadestintervaloverwhichtheresponse
of thin films can be interrogated. Advanced optical and structural investigations
techniques are required for characterization of thin films. Likewise, intricate theo-
reticaltoolsareneededwhentheattemptismadetorelatetheobservationsmadeto
therealstructureofthethinfilms.Thetoolsforcalculationsdescentfromquantum
mechanicsaswellascontinuumphysicsconcepts,andtheirimplementationscanbe
made easily on personal computers or may reach the limits of contemporary
computation capabilities.
The book reflects the complexity of this topic from a multitude of perspectives.
Introductory portions provide the reader with the information on techniques for
opticalandstructural characterization ofadvanced opticalthin films.Examples are
presentedwherethereaderiswalkedthroughthecomplexityandchallengeswhich
one faces when simply questions are related to complex structured real samples.
Rather than attempting to cover the vastness of all possible situations, the book
vii
viii Foreword
focusesonselectedexamples,suchasmicrostructuregradients,porosity,damages,
defects, thin films composed of regular nano- and microstructures, and challenges
in instrumentation and their circumvention.
Thebookisnotthefirstinthisfieldandwillnotbethelast.Itisthecurrentbest
step stone to the next level of understanding.
I found the book a very interesting read and recommend it highly to beginners
andexpertsalike,bothinthefieldofopticalcharacterizationofthinfilmsaswellas
toanyoneinourexpanding,multidisciplinaryscientificcommunitywhoisworking
with thin films.
Lincoln, NE, USA Mathias Schubert
July 2017
Preface
TheideaforthisbookaroseatabilateralworkshopheldbycolleaguesfromCzech
Republic and Germany on optical coating characterization in Brno, Czech
Republic, October 11–13, 2016. The workshop dealt with different aspects of thin
film optical characterization, including modeling, spectrophotometric approaches,
spectroellipsometric approaches, specifics of characterization of defected or cor-
rugated coatings, as well as the measurement of smallest optical losses with
laser-basedexperimentalequipment.Itthusprovidedasnapshotonthecurrentstate
of the art in diverse branches of optical coating characterization.
In a narrower sense, all speakers at the workshop stemmed from research
facilitieslocatedeitherinBrno(CzechRepublic)orinJena(Germany),sothatthe
broad circle of characterization approaches presented there also served as a
demonstration of the analytic possibilities located in these two cities.
We strongly believe that the material discussed and presented at the workshop
maybeofinteresttoabroaderaudience.Therefore,eachofthespeakerswasaskedto
extendthecontentofhisorherpresentationinordertosupplyachapterthatbecame
partofthepresentbook.Itwasourfirstintentiontoprovideaguidetomodernand
powerful thin film characterization techniques while emphasizing the benefits
of their coherent interaction, even when including non-optical techniques into the
characterization approach. Thus, atomic force microscopy combined with mea-
surementsoftheelasticallyscatteredlightappearstobeapowerfultoolforsurface
andfilmroughnessinvestigation.Informationonfilmporositymaybegainedfrom
simple spectrophotometric (or spectroellipsometric) measurements performed in
different ambient conditions and spectral ranges, combined with an elemental
analysisperformed,forexample,byenergy-dispersiveX-rayspectroscopy.
Our second intention was to emphasize the role of modeling. Practically
throughout the whole book text, emphasis is placed on the development and pre-
sentationofmanageabletheoreticalmodelswithhighestpredictivepower,andwith
clearly defined interfaces to interact with experimentally available input data. All
presented models are applicable to broadest classes of characterization problems
currently needed in industrial and partially also in academic research. In this con-
text, characterization examples are presented, which are in most cases of high
ix
x Preface
practical relevance today. They stem from real characterization problems and
illustrate the feasibility of the coherent interaction of robust theoretical approaches
and modern commercially available measurement facilities.
Concerningthetargetaudienceofthisbook,itisourfeelingthateveryscientist
or engineer having finished a master study in a physical, chemical, or engineering
discipline and being involved in thin film characterization tasks can benefit from
reading this book.
The editors are extremely grateful to all authors for their effort to provide
high-qualitycontributionsinaveryshorttime—ittooklessthanninemonthsofthe
workshop to the submittal of the book manuscript. Many thanks are also to
Professor Mathias Schubert, Electrical & Computer Engineering, University of
Nebraska–Lincoln, for critical remarks to the manuscript and, in particular, for
contributing a foreword to this book.
AllGermanauthorsacknowledgethefinancialsupporttotheworkshopprovided
by the Deutsche Forschungsgemeinschaft DFG. All authors thank to the Brno
University of Technology and Masaryk University, Brno, for organizing the
workshop.
Jena, Germany Olaf Stenzel
Brno, Czech Republic Miloslav Ohlídal
