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About Microfabrication Technologies: MECH 466 Microelectromechanical Systems
The document discusses various microfabrication technologies used for creating microelectromechanical systems (MEMS) including bulk micromachining techniques like anisotropic wet etching and dry etching, as well as surface micromachining techniques like Multi-User MEMS Processes (MUMPs) and the SUMMiT process. It provides detailed explanations and examples of each technique.
Detailed Information
| Author: | ['Mohana Sundaram Ma Ni'] |
|---|---|
| Publication Year: | 2015 |
| Pages: | 19 |
| Language: | English |
| Format: | |
| Price: | FREE |
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