Mems/Nems: (1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS (v. 1)

2140 Pages·2006·44.34 MB·English

by  Cornelius T. Leondes

MEMS/NEMS
Handbook Techniques and Applications
Volume1
DesignMethods
MEMS/NEMS
Handbook Techniques and Applications
Volume 1
Design Methods
Edited by
Cornelius T. Leondes
UniversityofCalifornia
LosAngeles,USA
LibraryofCongressCataloging-in-PublicationData
MEMS/NEMS;microelectromechanicalsystems/nanoelectromechanicalsystems/
EditedbyCorneliusT.Leondes
p. cm.
Includesbibliographicalreferencesandindex.
Contents:v.1.DesignMethodsinMEMS/NEMS–v.2.FabricationtechniquesforMEMS/NEMS–
v.3.ManufacturingmethodsinMEMS/NEMS–v.4.SensorsandactuatorsinMEMS/NEMS–
v.5.MedicalapplicationsofMEMS/NEMSandMOEMS(microopticalelectromechanicalsystems)
ISBN10 0-387-24520-0 Printedonacid-freepaper. ISBN10 0-387-25786-1(e-book)
ISBN13 9780387245202 ISBN13 9780387257862
1.Microelectromechanicalsystems—Designandconstruction. 2.Nanotechnology,
I.Leondes,CorneliusT.
TK153.M4462005
620(cid:1).5—dc22 2005042621
(cid:2)C 2006SpringerScience+BusinessMedia,Inc.
Allrightsreserved.Thisworkmaynotbetranslatedorcopiedinwholeorinpartwithoutthewritten
permissionofthepublisher(SpringerScience+BusinessMedia,Inc.,233SpringStreet,NewYork,NY10013,
USA),exceptforbriefexcerptsinconnectionwithreviewsorscholarlyanalysis.Useinconnectionwithany
formofinformationstorageandretrieval,electronicadaptation,computersoftware,orbysimilarordissimilar
methodologynowknoworhereafterdevelopedisforbidden.
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proprietaryrights.
PrintedintheUnitedStatesofAmerica
9 8 7 6 5 4 3 2 1 SPIN11357766
springeronline.com
Contents
Foreword ix
Preface xiii
Contributors xvii
1. ManufacturingAdvisoryServiceSystemforConcurrentandCollaborative
DesignofMEMSDevices 1
XuanFZha
1. Introduction 2
2. CurrentStatusofResearch 4
3. ConcurrentCollaborativeDesignMethodologiesand
FrameworkforMEMS 6
4. StrategyforMEMSManufacturingProcessand
MaterialSelection 11
5. KnowledgeSupportforMEMSManufacturingProcessand
MaterialSelection 14
6. MEMSManufacturingAdvisoryServiceSystem 18
7. UseofWebMEMS-MASS 26
8. ResultsandDiscussions 29
9. SummaryandFutureWork 31
10. DisclaimerandAcknowledgement 31
References 32
2. Web-EnabledKnowledge-IntensiveSupportFrameworkforCollaborative
DesignofMEMS 35
XuanFZha
1. Introduction 36
2. CurrentStatusofResearch 37
3. KnowledgeIntensiveCollaborativeFramework
forNetwork-CentricDesign 41
4. KS-WebDMMEFrameworkforCollaborativeDesignofMEMS 43
5. DevelopmentofWeb-BasedCollaborativeMEMSDesignSystem 46
6. CaseStudy:CollaborativeDesignforAMicrogripper 52
7. SummaryandFutureWork 60
8. Disclaimer 63
References 63
vi CONTENTS
3. Web-EnabledDatabaseSystemDevelopmentforDesignandManufacturing
ofMicro-Electro-MechanicalSystems(MEMS) 73
XuanFZha,W.Y.Toh,andH.Du
1. Introduction 74
2. MEMSFabrication/ManufacturingTechnologies 75
3. DatabaseDesignFundamentals 84
4. DesignofMEMSManufacturingDatabases 91
5. DevelopmentoftheWebEnabledDatabaseSystemSoftware 96
6. IntegrationoftheWebDatabaseSystemwithMEMS
CAD/CAM/CAESystem 103
7. DiscussionsandSummary 106
8. Disclaimer 107
References 107
4. TechniquesinProperOrthogonalDecompositionandComponent
ModeSynthesisfortheDynamicSimulationofComplexMEMS
DevicesandTheirApplications 111
W.Z.Lin,S.P.Lim,andY.C.Liang
1. Introduction 111
2. ProperOrthogonalDecomposition 113
3. GalerkinProcedure 116
4. ASingleStructuralMEMSDeviceandModelDescription 117
5. AComplexMEMSDeviceandModelDescription 131
6. ConcludingRemarks 148
7. Acknowledgement 149
References 149
5. TechniquesinGlobalOptimalDesignforMEMSand
TheirApplications 151
AndojoOngkodjojoandFrancisE.H.Tay
1. Introduction 152
2. Single-ObjectiveOptimization 152
3. Multi-ObjectiveOptimization 152
4. ComparisonAmongtheSAandOtherAlgorithms 156
5. Applications 157
6. Conclusion 170
7. Acknowledgement 171
References 171
6. TheoryandDesignofMicromechanicalVibratoryGyroscopes 173
VladislavApostolyuk
1. Introduction 173
2. OperationPrincipleandClassification 174
3. DynamicErrorandBandwidth 191
4. DesignMethodology 195
CONTENTS vii
5. Resume 195
References 195
7. AHierarchicalDesignPlatformforMicroelectrofluidicSystems(MEFS) 197
TianhaoZhang,KrishnenduChakrabartyandRichardB.Fair
1. Introduction 197
2. HierarchicalDesignPlatform 203
3. PCRPerformanceEvaluationUsingtheUniversalHierarchical
DesignPlatform 212
4. Conclusion 231
References 232
8. TechniquesinElectrostaticsAnalysisofMEMSandTheirApplications 235
E.T.Ong,K.M.Lim,andH.P.Lee
1. Introduction 235
2. ImprovingAccuracyofElectrostaticsAnalysis 237
3. ImprovingEfficiencyofSolutionMethod 272
References 288
9. TechniquesforEfficientAnalyticalandSimulationMethodsinthe
PrototypingofMEMSSystems 293
Y.Su,C.S.Chong,Q.X.WangandHuaLi
1. Introduction 293
2. AutomaticMeshGeneration 294
3. AutomaticModelDecompositionandReduction 300
4. CoupledBEMandFEM 304
5. MeshlessMethodology 309
6. ApplicationsofMeshlessTechniques 324
7. Conclusions 330
References 332
Index 335
Foreword
Over the next decade, major industrial and scientific trends that emerged during 1990s
will influence not only how manufacturing will be done, but also what is manufactured.
The size of many manufactured goods continues to decrease, resulting in ultra-miniature
electronicdevicesandnewhybridtechnologies.Ithasbeenpredictedthatwithinthenext
decadeatleasthalfofthenewlydesignedadvancedmaterialsandmanufacturingprocesses
will be built at the nanoscale. MEMS/NEMS (Micro/Nano Electro-Mechanical Systems)
isarapidlygrowingfieldbuildingupontheexistingsiliconprocessinginfrastructureand
techniquestocreatemicro/nano-scaledevicesorsystems.MEMS/NEMSdevicesintegrate
physical,chemical,andevenbiologicalprocessesinmicro-andmillimeter-scaletechnol-
ogypackages.MEMS/NEMSdevicesnowareemergingasproductdifferentiatorsinmarket
areassuchasautomotive,aerospace,electronicsinstrumentation,industrialprocesscontrol,
appliances,biotechnology,healthcare,officeequipment,andtelecommunications.Unlike
conventional integrated circuits, micro/nano devices can have many functions including
sensing,communication,andactuation.MEMS/NEMStechnologyjustlikemicroelectron-
icswillpermeateourdailylivesinthecomingdecades.Onthehorizonisthedevelopment
of nanomanufacturing technologies that will support tailor-made products having func-
tionallycriticalnanometer-scaledimensionsproducedusingmassivelyparallelsystemsor
self-assembly.Thetrendinproductminiaturizationwillrequirenewtechniquesfordesign,
fabrication/manufacturing,andprocessmeasurementandcontrolthatcanspanmillimeter,
micrometer, and nanometer-size scales while accounting for the associated physics that
governthedeviceandenvironmentinteractionateachspecificsizescale.Thiswillrequire
newstandardizedarchitectures,advancedcomputationalrepresentations,andinnovativede-
signmethodsandprocessesthatsupportmultiplephysics-basedmodelsandallowseamless
transitionandtraversingthroughthesevariousmodels.
MEMS/NEMS is a significant, extremely timely contribution to the MEMS and
nanotechnology field. Edited by Professor Cornelius Leondes, a leading contributor to
MEMS/NEMS,thissetoffivewell-integratedvolumesonthesubjectofMEMSandnan-
otechnology provides a valuable reference for researchers and practitioners. This multi-
volume major reference work features contributions from more than 100 of the world’s
foremost MEMS/NEMS authorities in industry, government, and academia. It provides a
wealthofthestate-of-the-arttechniquesandapplicationsinMEMS/NEMS.Incontrastto
ordinary academic pedagogy, where abstraction and elegance are the guiding principles,
practicaltechniquesandapplicationsrequiredetailedrelevantexamplesorcasestudiesthat
canbeusedbypractitionerstosuccessfullyinnovatenewdesign,fabrication/manufacturing,
andoperationalcapabilities.TheprogressoftheMEMSandnanotechnologydependson
x FOREWORD
the flow of these innovations, which requires multi-volume major reference works with
carefullyselected,well-written,andwell-editedexamplesandapplications.
The two most valuable features of this major reference work are the breadth of ma-
terial and the depth of the topics covered. Each volume comprehensively treats a sig-
nificant and specific subject area of fundamental importance to MEMS/NEMS: design,
fabrication/manufacturing, and applications. Volume I addresses the design methods in
MEMS/NEMS.Herethereadercanlearnfromsomeoftheleadingindividualsinthefield
howtodesignanMEMS/NEMSdeviceorsystem.Ninechapterscomprehensivelydescribe
emergingdesign,analysisandsimulation,synthesistechniquesandhowtoapplythemin
realapplications.Theseincludeelectrostaticsanalysis,analyticalsimulation,synthesisand
dynamic simulation, global optimal design, hierarchical design, knowledge intensive de-
sign,concurrent&collaborativedesignmethodologiesandweb-enabledframeworksand
systems. Volume II covers the fabrication techniques for MEMS/NEMS devices. In this
volume the reader can see the methods and steps taken to effectively fabricate different
typesofmicro/nanodevicesandstructures,includingmicrorotors,ultrasonictransducers,
thermally-based micro devices, micro fluidic devices, nano-structures, micro-mechanism
joints,etc.VolumeIIIdescribesmanufacturingmethods/techniquesforMEMS/NEMSout
of micro/nano components or parts, including micro-machine tool prototypes and micro-
factories,tool-basedmicro-machining,rapidprototypingandrapidtooling,injectionmold-
ing, laser machining, acoustic microscopy scanning, production scheduling, etc. The last
two volumes provide insight into developing and deploying micro/nano devices and sys-
tems in a wide range of applications. Volume IV comprehensively discusses micro/nano
sensorsandactuators,theirmodelingtechniquesandapplicationsinMEMS/NEMS.These
includeaccelerometers,micro-humiditysensor,micro-pumpactuator,stressmeasurement
sensor,micro-thermalactuator.VolumeVspecificallydescribesmedicalapplicationsof the
state-of-the-artMEMS/NEMSandMOEMS(MicroOpticalMechanicalSystems)devices,
including: biomedical devices, actuators and sensors for glaucoma treatment, electro-
thermal MEMS mirrors, endo-vascular micro-tools, optical MEMS devices, optically
integratedpressureandtemperaturesensors,opticalmicro-scanners,torsionmicro-mirrors,
etc.Collectively,thismaterialprovidestremendousresourcesforemergingdesign,fabri-
cation/manufacturingtechniquesandapplicationsofMEMS/NEMSandMOEMS.
Tounderstandtheessenceofthismajorreferencework,wecanconsider/reviewitin
thecontextoftheevolutionofMEMS/NEMStechniquesandtheirapplications.Theearly
dayswerespentinsomewhatofaprobingfashion,whereresearcherslookedforwaysto
designamicro/nanodeviceorsystemthatpromisestohavemultiplefunctionalitiesusing
batchfabricationtechniquessimilartothewayintegratedcircuitsaremade.Armedwithan
understandingofhowtodesignandfabricateamicro/nanodeviceorsystem,researcherscan
continuouslydevelopnewdesign,fabrication/manufacturing,andevencontroltechniques
and useful applications to solve real-world problems. The current research extensively
covers design, analysis and simulation, synthesis, fabrication/manufacturing, and control
techniquesofMEMS/NEMSandtheirapplications.Inparticular,thequantumcontrolled
NEMSornanotechnologyisnowthefocalresearchareaallovertheworld.Thetopicsthat
arebeingexploredarescalinglawsandprinciplesforNEMS,modelingofNEMSdevices,
materialsandstructures,controlofNEMS,andapplicationsofNEMSincarbonnanotubes,
nanowires,andmolecularelectronicsareas.Thus,thecurrenteffortcomprisestheresearch
thrustsupportingmanufacturingattheatomic,molecular,andmicro-millimeter(nanometer)
FOREWORD xi
scalesandservesasthemechanismfordevelopmentofrelevantmodels,architectures,and
methodsforMEMS/NEMSdesignandmanufacturingaswellascontrolsystems.However,
the major challenges we are facing for developing MEMS and nanotechnology products
are:lackofcomprehensive,reliablematerialproperties;difficultyinqualifyingnewprocess
flowsanddesigntoolsthatmeettherequirementsofconcurrent&collaborativeengineering
strategies;packagingdifferingsignificantlyfrommicroelectronics;lackofstandardsacross
industry; lack of maturity for design methodologies and tools. Therefore, the emerging
techniques,applications,andexamplesofMEMS/NEMScollectedbyProfessorLeondes
inthisworkprovideawealthofpracticalideasandmethodologiesdesignedtotriggerthe
developmentofinnovation.Thecontributorsinthismajorreferenceworkclearlyrevealthe
effectivenessandgreatsignificanceofthetechniquesavailableandwithfurtherdevelopment
theessentialrolethattheywillplayinthefuture.
Alongthewaytherewereafewindividualswhopublishedorsawtheimportanceof
publishingtheaccomplishmentstoprovideguidancetoadvancethefieldofMEMS/NEMS.
AmongthissmallgroupIbelievethatProfessorLeondeshasmadethemostcomprehensive
and important contribution to this effort. It has taken many decades of experience and
unflagging hard work for him to accumulate the wisdom and judgment reflected in the
editorial stewardship of this major reference work. The latest work discussed here is his
most valuable contribution to date and should be on the desk of anyone involved in the
field.Ibelievethatitspublicationwilldefinitelystimulateandpromotefurtherresearchand
developmentofMEMS/NEMSandspeeduptheapplicationofMEMS/NEMS.
XuanFZha
NationalInstituteofStandardsandTechnology
Gaithersburg,Maryland,USA
July31,2005