MEMS and Microstructures in Aerospace Applications

369 Pages·2005·12.26 MB·English

by  Robert Osiander

MEMS
and
Microstructures

Aerospace
in
Applications
Edited by
Robert Osiander
M. Ann Garrison Darrin
John L. Champion
Boca Raton London New York
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© 2006 by Taylor & Francis Group, LLC
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International Standard Book Number-10: 0-8247-2637-5 (Hardcover)
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Library of Congress Cataloging-in-Publication Data
Osiander, Robert.
MEMS and microstructures in aerospace applications / Robert Osiander, M. Ann Garrison Darrin,
John Champion.
p. cm.
ISBN 0-8247-2637-5
1. Aeronautical instruments. 2. Aerospace engineering--Equipment and supplies. 3.
Microelectromechanical systems. I. Darrin, M. Ann Garrison. II. Champion, John. III. Title.
TL589.O85 2005
629.135--dc22 2005010800
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Preface
MEMS and Microstructures in Aerospace Applications is written from a program-
matic requirements perspective. MEMS is an interdisciplinary field requiring
knowledge in electronics, micromechanisms, processing, physics, fluidics, pack-
aging,andmaterials,justtonameafewoftheskills.Asacorollary,spacemissions
requireanevenbroaderrangeofdisciplines.Itisforthisbroadgroupandespecially
for the system engineer that this book is written. The material is designed for the
systems engineer, flight assurance manager, project lead, technologist, program
management, subsystem leads and others, including the scientist searching for
new instrumentation capabilities, as a practical guide to MEMS in aerospace
applications. The objective of this book is to provide the reader with enough
background and specific information to envision and support the insertion of
MEMS in future flight missions. In order to nurture the vision of using MEMS in
microspacecraft—oreveninspacecraft—wetrytogiveanoverviewofsomeof
the applications of MEMS in space to date, as well as the different applications
which have been developed so far to support space missions. Most of these
applications are at low-technology readiness levels, and the expected next step is
to develop space qualified hardware. However, the field is still lacking a heritage
database to solicit prescriptive requirements for the next generation of MEMS
demonstrations. (Some may argue that that is a benefit.) The second objective of
this book is to provide guidelines and materials for the end user to draw upon to
integrate andqualify MEMS devices and instruments for future space missions.
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Editors
Robert Osiander received his Ph.D. at the Technical University in Munich,
Germany, in 1991. Since then he has worked at JHU/APL’s Research and Tech-
nology Development Center, where he became assistant supervisor for the sensor
science group in 2003, and a member of the principal professional staff in 2004.
Dr. Osiander’s current research interests include microelectromechanical systems
(MEMS), nanotechnology, and Terahertz imaging and technology for applications
in sensors, communications, thermal control, and space. He is the principal inves-
tigator on ‘‘MEMS Shutters for Spacecraft Thermal Control,’’ which is one of
NASA’s New Millenium Space Technology Missions, to be launched in 2005.
Dr. Osiander has also developed a research program to develop carbon nanotube
(CNT)-based thermal control coatings.
M. Ann Garrison Darrin is a member of the principal professional staff and is a
program manager for the Research and Technology Development Center at The
Johns Hopkins University Applied Physics Laboratory. She has over 20 years
experience in both government (NASA, DoD) and private industry in particular
with technology development, application, transfer, and insertion into space flight
missions. She holds an M.S. in technology management and has authored several
papers on technology insertion along with coauthoring several patents. Ms. Darrin
was the division chief at NASA’s GSFC for Electronic Parts, Packaging and
Material Sciences from 1993 to 1998. She has extensive background in aerospace
engineering management, microelectronics and semiconductors, packaging, and
advanced miniaturization. Ms. Darrin co-chairs the MEMS Alliance of the Mid
Atlantic.
JohnL.ChampionisaprogrammanageratTheJohnsHopkinsUniversityApplied
Physics Laboratory (JHU/APL) in the Research and Technology Development
Center (RTDC). He received his Ph.D. from The Johns Hopkins University, De-
partment of Materials Science, in 1996. Dr. Champion’s research interests include
design, fabrication, and characterization of MEMS systems for defense and space
applications. He was involved in the development of the JHU/APL Lorentz force
xylophone bar magnetometer and the design of the MEMS-based variable reflect-
ivityconceptforspacecraftthermalcontrol.ThiscollaborationwithNASA–GSFC
wasselectedasademonstrationtechniqueononeofthethreenanosatellitesforthe
New Millennium Program’s Space Technology-5 (ST5) mission. Dr. Champion’s
graduate research investigated thermally induced deformations in layered struc-
tures. He haspublished and presented numerous papers inhis field.
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Contributors
JamesJ. Allen R.David Gerke
SandiaNational Laboratory Jet Propulsion Laboratory
Albuquerque, New Mexico Pasadena,California
Bradley G.Boone Brian Jamieson
The Johns Hopkins UniversityApplied NASA Goddard Space Flight Center
PhysicsLaboratory Greenbelt, Maryland
Laurel,Maryland
RobertOsiander
Stephen P. Buchner
The Johns Hopkins UniversityApplied
NASA Goddard Space Flight Center
PhysicsLaboratory
Greenbelt, Maryland
Laurel,Maryland
Philip T. Chen
RobertPowers
NASA Goddard Space Flight Center
Jet Propulsion Laboratory
Greenbelt, Maryland
Pasadena,California
M. AnnGarrison Darrin
Keith J. Rebello
The Johns Hopkins UniversityApplied
The Johns Hopkins UniversityApplied
PhysicsLaboratory
PhysicsLaboratory
Laurel,Maryland
Laurel,Maryland
Cornelius J. Dennehy
NASA Goddard Space Flight Center Jochen Schein
Greenbelt, Maryland Lawrence Livermore National
Laboratory
Dawnielle Farrar Livermore, California
The Johns Hopkins UniversityApplied
PhysicsLaboratory Theodore D.Swanson
Laurel,Maryland NASA Goddard Space Flight Center
Greenbelt, Maryland
Samara L. Firebaugh
United States Naval Academy Danielle M.Wesolek
Annapolis,Maryland The Johns Hopkins UniversityApplied
PhysicsLaboratory
Thomas George
Laurel,Maryland
Jet Propulsion Laboratory
Pasadena,California
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Acknowledgments
Without technology champions, the hurdles of uncertainty and risk vie with cer-
tainty and programmatic pressure to prevent new technology insertions in space-
craft. A key role for these champions is to prevent obstacles from bringing
development and innovation toa sheer halt.
The editors have been fortunate to work with the New Millennium Program
(NMP) Team for Space Technology 5 (ST5) at the NASA Goddard Space Flight
Center (GSFC). In particular, Ted Swanson, as technology champion, and Donya
Douglas, as technology leader, created an environment that balanced certainty,
uncertainties, risks and pressures for ST5, micron-scale machines open and close
tovarytheemissivityonthesurfaceofamicrosatelliteradiator.These‘‘VARI-E’’
microelectromechanical systems (MEMS) are a result of collaboration between
NASA, Sandia National Laboratories, and The Johns Hopkins University Applied
Physics Laboratory (JHU/APL). Special thanks also to other NASA ‘‘tech cham-
pions’’ Matt Moran (Glenn Research Center) and Fred Herrera (GSFC) to name a
few!Workingwithtechnologychampionsinspiredustorealizethevastpotentialof
‘‘small’’ inspace applications.
AdebtofgratitudegoestoourmanagementteamDickBenson,BillD’Amico,
JohnSommerer,andJoeSuterandtotheJohnsHopkinsUniversityAppliedPhysics
LaboratoryforitssupportthroughtheJanneyProgram.Ourthanksareduetoallthe
authors and reviewers, especially Phil Chen, NASA, in residency for a year at the
laboratory.Thanks for sharing inthe pain.
There is one person for whom we are indentured servants for life, Patricia M.
Prettyman, whose skills and abilities were and are invaluable.
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Contents
Chapter1
Overview ofMicroelectromechanicalSystems and Microstructures
inAerospace Applications.........................................................................................1
Robert Osiander andM. Ann GarrisonDarrin
Chapter2
Vision for Microtechnology Space Missions..........................................................13
Cornelius J.Dennehy
Chapter3
MEMS Fabrication..................................................................................................35
James J.Allen
Chapter4
Impact of Space EnvironmentalFactors onMicrotechnologies............................67
M.AnnGarrison Darrin
Chapter5
Space Radiation Effects and Microelectromechanical Systems.............................83
Stephen P. Buchner
Chapter6
Microtechnologies for Space Systems..................................................................111
ThomasGeorgeand Robert Powers
Chapter7
Microtechnologies for Science InstrumentationApplications..............................127
Brian Jamieson and Robert Osiander
Chapter8
Microelectromechanical Systems for SpacecraftCommunications.....................149
BradleyGilbertBoone andSamara Firebaugh
Chapter9
Microsystems inSpacecraft Thermal Control......................................................183
Theodore D.Swanson and Philip T. Chen
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Chapter 10
Microsystems inSpacecraft Guidance, Navigation, andControl.........................203
Cornelius J. Dennehy and Robert Osiander
Chapter 11
Micropropulsion Technologies..............................................................................229
Jochen Schein
Chapter 12
MEMS Packaging for Space Applications............................................................269
R. David Gerkeand Danielle M. Wesolek
Chapter 13
Handling and ContaminationControlConsiderations
for Critical Space Applications.............................................................................289
Philip T. Chen and R. David Gerke
Chapter 14
Material Selection for Applications of MEMS.....................................................309
Keith J.Rebello
Chapter 15
Reliability Practices for Design and Application of Space-Based MEMS..........327
Robert Osianderand M. Ann Garrison Darrin
Chapter 16
Assurance Practices for Microelectromechanical Systems
andMicrostructures inAerospace.........................................................................347
M.Ann Garrison Darrin and Dawnielle Farrar
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1 Overview of
Microelectromechanical
Systems and
Microstructures in
Aerospace Applications
Robert Osiander and M. Ann Garrison Darrin
CONTENTS
1.1 Introduction......................................................................................................1
1.2 Implications ofMEMS and Microsystems inAerospace...............................2
1.3 MEMS inSpace...............................................................................................4
1.3.1 Digital Micro-Propulsion Program STS-93.........................................4
1.3.2 Picosatellite Mission.............................................................................5
1.3.3 ScorpiusSub-OrbitalDemonstration...................................................5
1.3.4 MEPSI...................................................................................................5
1.3.5 Missiles and Munitions — Inertial Measurement Units......................6
1.3.6 OPAL, SAPPHIRE,and Emerald........................................................6
1.3.7 International Examples.........................................................................6
1.4 Microelectromechanical Systems andMicrostructures
inAerospace Applications...............................................................................6
1.4.1 An Understanding ofMEMS and the MEMS Vision.........................7
1.4.2 MEMSin Space Systems andInstrumentation....................................8
1.4.3 MEMSin Satellite Subsystems............................................................9
1.4.4 Technical InsertionofMEMS in Aerospace Applications................10
1.5 Conclusion.....................................................................................................11
References...............................................................................................................12
Themachinedoesnotisolatemanfromthegreatproblemsofnaturebutplungeshim
moredeeplyintothem.
Saint-Exupe´ry,Wind,Sand,andStars,1939
1.1 INTRODUCTION
To piece togethera bookon microelectromechanicalsystems(MEMS)and micro-
structures for aerospace applications is perhaps foolhardy as we are still in the
1
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2 MEMSandMicrostructuresinAerospaceApplications
infancy of micron-scale machines in space flight. To move from the infancy of a
technologytomaturitytakesyearsandmanyawkwardperiods.Forexample,wedid
nottrulyattaintheageofflightuntilthelate1940s,whenflyingbecameaccessibleto
manyindividuals.Theinsertionoradoptionperiod,fromtheinfancyofflight,began
withtheWrightBrothersin1903andtookmorethan50yearsuntilitwaspopularized.
Similarly,thebirthofMEMSbeganin1969witharesonantgatefield-effecttransistor
designedbyWestinghouse.Duringthenextdecade,manufacturersbeganusingbulk-
etchedsiliconwaferstoproducepressuresensors,andexperimentationcontinuedinto
theearly1980stocreatesurface-micromachinedpolysiliconactuatorsthatwereusedin
discdriveheads.Bythelate1980s,thepotentialofMEMSdeviceswasembraced,and
widespreaddesignandimplementationgrewinthemicroelectronicsandbiomedical
industries. In 25 years, MEMS moved from the technical curiosity realm to the
commercialpotentialworld.Inthe1990s,theU.S.Governmentandrelevantagencies
had large-scale MEMS support and projects underway. The Air Force Office of
Scientific Research (AFOSR) was supporting basic research in materials while the
DefenseAdvancedResearchProjectsAgency(DARPA)initiateditsfoundryservicein
1993.Additionally,theNationalInstituteofStandardsandTechnology(NIST) began
supportingcommercialfoundries.
Inthelate1990s,earlydemonstrationsofMEMSinaerospaceapplicationsbegan
tobepresented.InsertionshaveincludedMightySat1,ShuttleOrbiterSTS-93,the
1
DARPA-ledconsortiumoftheflightofOPAL,andthesuborbitalrideonScorpius
(Microcosm).Theseearlyentrypointswillbediscussedasafoundationforthenext
generationofMEMSinspace.Severalearlyapplicationsemergedintheacademic
andamateursatellitefields.Inlessthana10-yeartimeframe,MEMSadvancedtoa
full, regimented, space-grade technology. Quick insertion into aerospace systems
fromthispointcanbepredictedtobecomewidespreadinthenext10years.
ThisbookispresentedtoassistinusheringinthenextgenerationofMEMSthat
willbefullyintegratedintocriticalspace-flightsystems.Itisdesignedtobeusedby
the systems engineer presented with the ever-daunting task of assuring the mitiga-
tionof risk when inserting new technologies into space systems.
ToreturntothequoteabovefromSaintExupe´ry,theapplicationofMEMSand
microsystems to space travel takes us deeper into the realm of interactions with
environments.Threeenvironmentstobespecific:onEarth,atlaunch,andinorbit.
Understandingtheimpactsoftheseenvironmentsonmicron-scaledevicesisessential,
andthistopiciscoveredatlengthinordertopresentaspringboardforfuturegener-
ations.
1.2 IMPLICATIONS OF MEMS AND MICROSYSTEMS
IN AEROSPACE
The starting point for microengineering could be set, depending on the standards,
sometime in the 15th century, when the first watchmakers started to make pocket
watches, devices micromachined after their macroscopic counterparts. With the
introduction of quartz for timekeeping purposes around 1960, watches became the
first trueMEMSdevice.
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