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About Correlation of particle fluxes and film properties deposited by vacuum arc
26. 3 DLC Deposition Techniques. 28. 4 DC Discharge in the Vacuum. 29. 5 Arc Discharge. 32. 5.1 Cathodic Arc. 34. 5.2 Macroparticle Filtering. 38 . To optimize the process, fundamental physical understanding is necessary. S. K. O'leary, S. R. Johnson and P. K. Lim: The Relationship Between.
Detailed Information
| Author: | Thinkpad User |
|---|---|
| Publication Year: | 2014 |
| Pages: | 179 |
| Language: | English |
| File Size: | 9.11 |
| Format: | |
| Price: | FREE |
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