Applications of Diamond Films and Related Materials: Proceedings of the First International Conference on the Applications of Diamond Films and Related Materials – ADC '91 Auburn, Alabama, U.S.A., August 17–22, 1991

581 Pages·1991·79.34 MB·English

by  Y. Tzeng

MATERIALS SCIENCE MONOGRAPHS, 73
APPLICATIONS OF
DIAMOND FILMS AND
RELATED MATERIALS
Proceedings of the First International Conference on
the Applications of Diamond Films and Related Materials - ADC '91
Auburn, Alabama, U.S.A., August 17-22, 1991
Edited by
Y. TZENG
Department of Electrical Engineering
Auburn University
Auburn, Alabama, U.S.A.
M. YOSHIKAWA
Tokyo Institute of Technology
Tokyo, Japan
M. MURAKAWA
Nippon Institute of Technology
Saitama, Japan
A. FELDMAN
National Institute of Standards and Technology
Gaithersburg, Maryland, U.S.A.
ELSEVIER
Amsterdam - Oxford - New York - Tokyo 1991
ELSEVIER SCIENCE PUBLISHERS B.V.
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Distributors for the U.S.A. and Canada:
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Library of Congress Cataloglng-ln-PublIcatton Data
International Conference on the Applications of Diamond Films and
Related Materials (1st : 1991 : Auburn, Ala.)
Applications of diamond films and related materials ·. proceedings
of the First International Conference on the Applications of Diamond
Films and Related Materials : ADC '91, Auburn, Alabama, U.S.A.,
August 17-22, 1991 / edited by Y. Tzeng ... [et al.],
p. cm. — (Materials science monographs ; 73)
Includes indexes.
ISBN 0-444-89162-5
1. Diamonds, Artifical—Congresses. 2. Diamond thin films-
-Congresses. I. Tzeng, Y. (Yonhua) II. Title. III. Series.
TP873.5.D3I58 1991
666'.88—dc20 91-21719
CIP
ISBN: 0 444 89162 5
© ELSEVIER SCIENCE PUBLISHERS B.V., 1991
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ν
FOREWORD
These are the Proceedings of the first conference emphasizing the
applications of diamond films and related wide bandgap semiconductors
and superhard materials. These materials are rapidly becoming
economically significant. Due to their combination of superior properties-
great hardness, high thermal conductivity, chemical inertness, high
stiffness, high carrier mobilities, etc, these materials are attracting
considerable interest. Initial commercial products employing the new
diamond technology are already on the market. These include diamond
loudspeakers, diamond x-ray windows, diamond bonders, diamond cutting
tools, and heads for magnetic disks coated with diamond-like carbon.
Other potential products include heat dissipating electronic substrates,
hard infrared windows and coatings, electroluminescent devices, high
power active electronics, etc. These products will be important not only
in terms of their own markets, but, also because they are expected to
enable a wide range of other new products and production methods.
An intensifying interest by the scientific, technical, and industrial
community in the new diamond technology can be attested to by an
examination of the technical calendar which shows an ever increasing
number of conferences devoted to these exciting materials. In view of the
competition for attendees, the great interest expressed in this conference
attests to the growing importance of applications of the new diamond.
Alternating with the International Conference on the New Diamond
Science and Technology, the Applied Diamond Conference is planned to
be held every other year, with ADC '91 being held in the United States
and ADC '93 in Japan.
We thank all of the sponsors, attendees, contributors, committee
members, and session chairs who have made this conference a success.
Albert Feldman, Chairman Manasori Yoshikawa, Chairman
Organizing Committee Program Committee
Masao Murakawa, Co-Chairman Yonhua Tzeng, Co-Chairman
Organizing Committee Program Committee and
Secretary, Organizing Committee
APPLIED DIAMOND CONFERENCE 1991
ORGANIZING COMMUTEE
Masao Murakawa, Co-Chairman
Albert Feldman, Chairman
Nippon Institute of Technology
National Institute of Standards and Technology
Saitama, Japan
Gaithersburg, MD USA
Yonhua Tzeng, Secretary Shojiro Miyake, Assistant Secretary
Nippon Institute of Technology
Auburn University
Saitama, Japan
Auburn, AL USA
S. Holly
Louis Κ. Bigelow Rocket-Dyne
Norton Company Canoga Park, CA USA
Northboro, MA USA
Alan H. Lettington
J.E. Butler Royal Signals & Radar Establishment
Naval Research Laboratory Great Malvern, Worcs. United Kingdom
Washington, DC USA
William D. Partlow
Mark A. Cappelli
Westinghouse Science & Technology Center
Stanford University
Pittsburgh, PA USA
Stanford, CA USA
J. Michael Pinneo
Yves Catherine
Crystallume
UMR C.N.R.S.
Nantes Cedex, France Menlo Park, CA USA
Junichi Sato
Francis G. Celii
Showa Denko KK
Texas Instruments
Tokyo, Japan
Dallas, TX USA
Mats E. Sjostrand
Robert E. Clausing
AB Sandvik, Coromant
Oak Ridge National Laboratory
Lekrogsva gen, Sweden
Oak Ridge, TN USA
Sokichi Takatsu
R. N. Dewitt
Toshiba Tungaloy Co.
Naval Surface Warfare Center
Kanagawa, Japan
Silver Spring, MD USA
Ichiro Tokumitsu
Rainer Doehl-Oelze
Idemitsu Petrochemical
VDI Technology Center
Tokyo, Japan
Dusseldorf, FRG
K. Wu
Y. Fujiwara
SDIO/IST
Mitsubishi Metal Corporation
Tokyo, Japan Washington, DC USA
Osamu Fukunaga Shuji Yazu
Tokyo Institute of Technology Sumitomo Electric Ind. Ltd.
Tokyo, Japan Hyogo, Japan
Max N. Yoder
Alfred Grill
Office of Naval Research
IBM, T.J. Watson Research Center
Arlington, VA USA
Yorktown Heights, NY USA
Masanori Yoshikawa
D. Harris
Tokyo Institute of Technology
Office of Naval Technology
Tokyo, Japan
China Lake, CA USA
Akio Hiraki
Osaka University
Osaka, Japan
viii
INTERNATIONAL ADVISORS
John C Angus Michael Seal
Case Western Reserve University Sigillum, B.V.
Cleveland, OH USA Amsterdam, The Netherlands
N. Setaka
Thomas R. Anthony
NIRHVi
GE Corporation
Schenectady, NY USA Ibaraki, Japan
M. Kamo B.V. Spitsyn
Institute of Physical Chemistry
NERIM
Moscow, USSR
Ibaraki, Japan
Benno Lux
Technische Universitat Vienna
Vienna, Austria
PROGRAM COMMITTEE
Yonhua Tzeng, Co-Chairman
Masanori Yoshikawa, Chairman
Auburn University
Tokyo Institute of Technology
Auburn, AL USA
Tokyo, Japan
Alan H. Lettington
Naoji Fujimori
Royal Signals & Radar Establishment
Sumitomo Electric Ind. Ltd.
Great Malvern, Worcs. United Kingdom
Hyogo, Japan
Masao Murakawa
Paul D. Gigl
Nippon Institute of Technology
GE Superabrasives
Saitama, Japan
Worthington, OH USA
K. Shibuki
Yoichi Hirose
Toshiba Tungaloy Co., Ltd.
Nippon Institute of Technology
Kanagawa, Japan
Saitama, Japan
Stafifen Soderberg
David S. Hoover
Sandvik, Materials & Processes
Diamonex, Inc.
Lekrogsva gen, Sweden
Allentown, PA USA
Hitoshi Tokura
Moribund M. Kikuchi
Tokyo Institute of Technology
Mitsubishi Metal Corporation
Tokyo, Japan
Saitama, Japan
Charles B. Willingham
Claus-Peter Klages
Raytheon Company
Fraunhofer-Institut
Lexington, MA USA
Hamburg, FRG
Walter A. Yarbrough
Kunio KomaJri
Pennsylvania State University
Showa Denko KK Center
University Park, PA USA
Tokyo, Japan
Max N. Yoder
Office of Naval Research
Arlington, VA USA
ix
LOCAL ARRANGEMENTS
Anthony K. Hyder, Chairman Thaddus RoppeL Co-Chairman
Auburn University Auburn University
Auburn, AL USA Auburn, AL USA
Charles Ellis, Exhibit Chairman R. Ramesham
Auburn University Auburn University
Auburn, AL USA Auburn, AL USA
Calvin Cutshaw James R. Wilbanks
Auburn University Auburn University
Auburn, AL USA Auburn, AL USA
J. Fred O'Brien, Jr. Ann Crance
Auburn University Auburn University
Auburn, AL USA Auburn, AL USA
Debra Alexander
Auburn University
Auburn, AL USA
ORAL SESSION CHAIRS
M. Anschel P. Klocek
IBM Texas Instruments
Hopewell Junction, NY USA Dallas, TX USA
J. Butler K. Kurihara
Naval Research Laboratory Fujitsu Labs. Ltd.
Washington, DC USA Atsugi, Japan
M. Cappelli J. Larsen-Basse
Stanford University National Science Foundation
Stanford, CA USA Washington, DC USA
R.N. Dewitt A. Lettington
Naval Surface Warfare Center Royal Signals & Radar Establishment
Silver Spring, MD USA Great Malvern, Worcs. UK
A. Feldman B. Lux
National Institute of Standards Technical University of Vienna
and Technology Vienna, Austria
Gaithersburg, MD USA
M. Mirtich
N. Fujimori NASA Lewis Research Center
Sumitomo Electric Ind. Ltd. Cleveland, OH USA
Hyogo, Japan
M Murakawa
O. Fukunaga Nippon Institute of Technology
Tokyo Institute of Technology Saitama, Japan
Tokyo, Japan
H. Tokura
P. Gigle Tokyo Institute of Technology
G.E. Superabrasive Tokyo, Japan
Worthington, OH USA
R.C Woodin
IvLN. Gardos Norton Company
Hughes Aircraft Northboro, MA USA
El Segundo, CA USA
K. Wu
D. Harris SDIO/IST
Office of Naval Technology Washington, DC USA
China Lake, CA USA
MN. Yoder
Y.Hirose Office of Naval Research
Nippon Institute of Technology Arlington, VA USA
Saitama Japan
M. Yoshikawa
GA Kim Tokyo Institute of Technology
Edge Technologies, Inc. Tokyo, Japan
Indianapolis, IN USA
ACKNOWLEDGMENT
APPLIED DIAMOND CONFERENCE 1991
Sponsored by:
Auburn University
Alabama Advanced Manufacturing Technology Center
Alabama Microelectronics Science and Technology Center
Space Power Institute
Center for Commercial Development of Space
Center for Advanced Technology
Japan New Diamond Forum
National Aeronautics and Space Administration
National Institute of Standards and Technology
National Science Foundation
Norton Company
Office of Naval Technology
Raytheon Company
Westinghouse Electric Corporation
In Cooperation with:
American Carbon Society
American Vacuum Society
American Society for Metallurgy
French Optical Society
IEEE - Electron Devices Society
International Society for Hybrid Microelectronics
Japan Society for Precision Engineering
SPLE - The International Society for Optical Engineering
TMS - Minerals, Metals, and Materials Society
The Surface Finishing Society of Japan
Applications of Diamond Films and Related Materials
Y. Tzeng, M. Yoshikawa, M. Murakawa, A. Feldman (Editors)
© Elsevier Science Publishers B.V., 1991 3
Applications of Bulk and Thin-Film Diamonds
M. Seal
Sigillum B.V., P.O. Box 7129, 1007 JC Amsterdam, The Netherlands
Abstract
The applications of bulk diamond are mainly in the jewelry and
abrasive industries. Other applications which use substantial quantities
of diamond include turning tools and wire drawing dies, whereas more
specialised uses are as thermally conducting substrates, optical
components, surgical knives, etc. Thin-film diamonds are clearly unsuited
for jewelry or as abrasives, but may be deposited as hard coatings on a
variety of softer materials to act as cutting tools or knives, thus in
effect forming abrasion resistant layers which allow the sharp edges to
remain sharp. They also may act as abrasion resistant layers on optical
surfaces such as those of spectacle lenses, as thermally conducting layers
on electronic device substrates ("heat sinks"), or as chemically resistant
layers.
1- BULK DIAMOND
Bulk diamond is to-day, in 1991, a major industry. Bulk diamond
comprises both natural (mined) diamond and high pressure synthesised
diamond. Estimates from a variety of sources put 1990 world natural
diamond production at about 100 million carats (or 20 tons). The major
producers are Australia (about 7 tons). West and Central Africa (about 6
tons), Botswana (about 3 tons), U.S.S.R. (about 2 tons), and South Africa
(about 1\ tons). The U.S.S.R. and total figures exclude diamonds mined in
the U.S.S.R. and consumed there, the 2 ton figure being an estimate only
of the total of Soviet rough diamonds exported to the West. The total
value of the 20 tons was probably in excess of $ 5 billion, giving an
average value of $ 50.00 per carat. This figure conceals, however, an
enormous variation in the value of individual diamonds which can range
from under $ 2.00 per carat for the lowest industrial boart qualities to
over $ 10,000.00 per carat for the finest large white gem stones. This
means that the money values of the production from the different
geographical areas are not directly correlated with the tonnage figures.
Australia, for example, has a large production of very low quality
industrial grades and only very limited numbers of the fancy pink
gemstones for which it has become famous. Namibia on the other hand has a
small production consisting almost entirely of gem quality diamonds. An
even more extreme case was the Letseng-la-Terae mine in Lesotho (now
closed) which relied financially on the production of a very few, very
large gem diamonds each year.
There have been claims of successful synthesis of diamond dating back
to the 19th century. The experiments of Moissan and of Hannay are pre-
4
eminent amongst this early work, and their results have been reviewed by
Seal [1] amongst others. They realised the need for high pressures though
it is unlikely that they achieved pressures which were sufficiently high
for diamond stability. Their work was discounted after true high pressure
synthesis was achieved in the 1950's by ASEA, General Electric, and De
Beers. Paradoxically with the proven possibility of low pressure CVD
diamond growth it now seems more likely or at least less unlikely that
Hannay and/or Moissan may in fact have grown a few small diamonds.
The theoretical basis of modern high pressure diamond synthesis rests
on calculations of the graphite-diamond equilibrium line in a pressure-
temperature phase diagram. The first calculation to give the general
picture of graphite stability at normal pressures and diamond stability at
elevated pressures was that of Miething [2] whilst the first in which one
could have reasonable confidence as to its accuracy was that of the famous
Berman-Simon line in 1955 [3]. The practical basis of modern high pressure
diamond synthesis rests on the pioneering work of P.W. Bridgman [4] and of
the engineering teams at ASEA, General Electric, and De Beers.
Since the 1950's growth of the diamond abrasive business has followed
a curve which looks almost exponential. In 1950 consumption of diamond
abrasive grit in the non-communist world was about 20 million carats (4
tons). By 1960 the consumption had risen to 6 tons. The latest estimate
for consumption in 1990 is between 70 and 80 tons. These figures are taken
from a publication by Martin [5] who also states that about 90% of the
present abrasive grit total is synthetic. Extrapolation of these numbers
would suggest that about 8 tons of natural diamond grit and about 75 tons
of synthetic diamond grit will be used in 1991, again excluding
consumption in the U.S.S.R. and other countries for which data are not
available. The value of the 1990 diamond and CBN grit market was given as
about $ 500 million. This corresponds to an average price of $ 1.25 to
$ 1.40 per carat. There is also a market amounting to about $ 100 million
per year in polycrystalline diamond (PCD) and polycrystalline CBN blanks
for cutting tool applications in the engineering and woodworking
industries and for drills for the oil, gas, and mining industries.
In short, the major application for bulk natural diamonds is jewelry,
and for bulk high pressure synthetics it is in abrasive products, cutting
tools and drills. Other applications of bulk diamond include single point
turning tools, wire drawing dies, styli, bearings, etc., together with the
newer applications such as heat sinks, anvils, optical components,
surgical blades and cleaving knives. These last have been described in a
variety of publications, to which reference is made for further details
[6-9]. In total these newer markets are fairly small at least as regards
present diamond consumption, but they are ones which are capable of great
expansion.
2. THIN FILM DIAMOND
The application of this material is the theme of the present
conference. Looking at the program one can see a tremendous range of
possibilities, the most exciting of which seem to be in active
electronics, and the most immediate as tool coatings and as heat sinks or
other passive substrates for electronic circuitry. If one considers the