Table Of ContentAdvanced Technologies Based on Wave and Beam
Generated Plasmas
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3. High Technology- Vol. 67
Advanced Technologies Based on
Wave and Beam Generated
Plasmas
edited by
H. Schluter
Ruhr-University Bochum,
Institute of Experimental Physics II,
Bochum, Germany
and
A. Shivarova
Sofia University,
Faculty of Physics,
Sofia, Bulgary
Springer-Science+Business Media, B.V.
Proceedings of the NATO Advanced Study Series on
Advanced Technologies Based on Wave and Beam Generated Plasmas
Sozopol, Bulgaria
May 22-June 1, 1998
Library of Congress Cataloging-in-Publication Data
ISBN 978-90-481-5191-2 ISBN 978-94-017-0633-9 (eBook)
DOI 10.1007/978-94-017-0633-9
Printed on acid-free paper
Ali Rights Reserved
© 1999 Springer Science+Business Media Dordrecht
Originally published by Kluwer Academic Publishers in 1999
Softcover re print of the hardcover 1s t edition 1999
No part of the material protected by this copyright notice may be reproduced or
utilized in any form or by any means, electronic or mechanical, including photo-
copying, recording or by any information storage and retrieval system, without written
permission from the copyright owner.
TABLE OF CONTENTS
Preface 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 ••• 0 ••• 0 • 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 • 0 xi
Acknowledgements .... o 0 0 ••••••••••••••• xiii
Part 1: Lectures
1.1 Gas Discharges: Applications
Plasma Discharges for Materials Processing and Display Applications
M.A. Lieberman . ....... 0 •••••• • 0 0 0 0 •• • •• • 0 ••••• 0 0 ••• •• •• 1
The Development and Use of Surface-Wave Sustained Discharges for
Applications
Mo Moisan, J. Hubert, J. Margot and Z. Zakrzewski ... 0 • 0 0 • 0 • • • • 0 •• 23
Electrodeless Gas Discharges for Lighting
G. G. Lister ............. . 0 • •••• • 0 0 0 0 0 •• 0 65
Plasma Production above Multipolar Magnetic Field Structures:
from DC Magnetrons to Distributed ECR
Jo Pelletier, To Lagarde and Y. Arnal ... 0 • • • 0 0 •• • • • • 0 0 0 • ••• • •• • 97
ECR Plasmas for Thin- Film Deposition
R. Wilhelm . . . 0 ••••••••••• • ••• . ... . . 111
Deposition Properties and Applications of Carbon-Based Coatings
Ro Wilhelm . . . . .. 0 • 0 0 0 •• 0 0 •••••••••••• 0 0 0 0 0 0 0 0 • • . . 123
Substrate Biasing during Plasma Processing: Interest, Methods and
Limitations
J. Pelletier . ...... . . . .. . .. o • • 0 •• • ••••• •• • 0 •• • • • •• • 0 ••• 137
Ion Energy Distributions
G.M. W. Kroesen, M. van der Grift, R.J.M.M. Snijkers and F.Jo de Hoog . 149
Dusty Plasmas: Fundamental Aspects and Industrial Applications
G.M. W. Kroesen, E. Stoffels, W. W. Stoffels, G.H.P.M. Swinkels,
A. Bouchoule, Ch. Hollenstein, P. Roca di Cabarrocas, J.-C. B ertolini,
G.S. Selwyn and F.J. de Hoog . .... . ..... . . . . . . . . .. . . ... . ... 175
1.2 Ion Implantation
Plasma Based Ion Implantation
W. Moller .. . 0 • 0 ••••• 0 0 0 0 0 • • 0 ••••••••• •• ••• • •• • •• • ••• 191
vi
1.3 Wave Generated Plasmas
Waveguide Stationary and Nonstationary Discharges: Modelling and
Experiments
D. Grozev, K. Kirov, I. Kaleva, K. Makasheva and A. Shivamva .. .. . . . 245
Nonuniformity Aspects in Modelling and Noncollisional Heating of HF
Discharges
H. SchlUter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
Travelling Wave Discharges in Nitrogen: Modelling and Experiment
C.M. Ferr·eir·a, F.M. Dias and E. Tatamva ....... . ....... . . . .... 311
Atmospheric Pressure Discharges: Travelling Wave Plasma Sources
Z. Zakrzewski and M. Moisan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 335
Modelling of Atmospheric Pressure Microwave Sustained Discharges
Z. Zakrzewski, J. Stanco and M. Moisan .... .... . ... . ... ... .... 343
Long Microwave Discharges
Z. Zakrzewski and M. Moisan . . . . . . .. .. . ...... ... .... 353
Waves in Bounded Magnetized Plasmas
S. T . Ivanov ... . .. . ... . . . .. .... .... ..... .. . .... . .... .. 367
1.4 Beam Generated Plasmas
Electron Beam Generated Plasmas: Theory, Experiments, Applications
M. V. Kuzelev, G.P. Mkheidze, A .A. Rnkhadze, P.S. Strelkov and
A . G. Shkvamnets ... .. .... ... . . .. . .. .. ... . . ..... . .... .. 391
EBIT: An Electron Beam Source for t he Production and Confinement of
Highly Ionized Atoms
G. Fuj]mann, C. Biederrnann and R. Radtke ...... . .. .. .. ... ..... 429
Part 2: Posters
The Anisotropic Etching of Silicon m CF4 , CF4 + Hz and CF4 - x Cix
Plasma
Z. Ruth.iniene, A . Gr·igonis and R . Knizikevicins . . .. 469
CF2 Production by CF4 Electron Impact Dissociation in Gas Discharge
V. V. Ivanov, K.S . Klopovskiy, D. V. Lopaev, 0 . V. Pmshina,
A . T . Rakhimov and T.V. Rakhimova . . . . . . . . . . . . . ....... . . ... 471
vii
On Negative Ions Langmuir Probe Measurements in an Ar + 4% CF4
Currentless Plasma
T. Popov, D. Ivanova and M. Tchernookov ... .... . . .. 473
Plasma Treatment of Polymer Surfaces in Different Gases
D.M. Svirachev and N.A. Tabaliov . . . . . . . . . . . . . . ........... 475
Plasma Treatment of Polymer Surfaces in Gas Mixture
D.M. Svirachev and N.A . Tabaliov ..... . .... . . . . . .. . ... 477
Field Emission Characteristics of Thin MPCVD Diamond Films
J. Engemann, G. Fedosenko, V. Raiko and D. Theirich . . . . . . . ... . 479
Technological Method of Substratum Metallization by Plasma- Arc
Deposition
A. V. Kostrov, V.I. Gundorin and A . V. Strikovski . . . . . . . . . . . . .... 481
Hydrodynamic and Electrical Characterization of Corona Discharge
Plasma Reactor
S. Robert, E. Francke and J. A mouroux . . . . . . . . . . . . . . . . . . . . . 483
Study by Mass Spectrometry and Gas Chromatography of Fluorocarbon
Waste Destruction in a Low-Pressure Plasma Reactor
F. Genet, S. Cavadias, K. Coulibaly, M.F. Gonnord and J. Amouroux .. 485
CARS Applied to Plasmas for NO- Reduction
T. Doerk, A. Dogan, A. Pott, J. Uhlenbusch, J. Hoschele,
J. Steinwandel and J. Ehlbeck ....... ... . .. ...... . .. . . 487
Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear
Analysis
I. V. Schweigert, V.A. Schweigert, A. Melzer, A. Homann and A. Piel . .. 489
Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid
Materials
J. Langner, J. Piekoszewski and J. Stanislawski . . ...... . . ....... . 491
Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma
Immersion Using a New High Voltage- High Current Pulse Generator
F. Le Creur, Y. Arnal, J. Pelletier, 0. Lesaint, 0. Maulat and M. Roche . . 493
Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge
in Pure 02 and H2
V. V. Ivanov, K.S. Klopovskiy, D. V. Lopaev, A . T. Rakhimov and
T. V. Rakhimova . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .... . 495
Diffusion and Wall Loss of Magnesium in Decaying Plasma
I. Rusinov, A . Blagoev, M. Pentcheva and V. Yordanov . . . . ......... 497
viii
Diffusion and Depopulation of the Metastable Cd3 P 0 2 States in Collisions
with Neon Atoms
A .I. Ogoyski and A.B. Blagoev . . . . . . . . . . . . . . . . . . . . . . . . . 499
Non·-Local Regime of Self-Consistency in Stationary Waveguided
Discharges
Kh. Tamev . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 501
Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of
Nonlinear Effects
M.N. Gcorgieva- Grosse and S. Grosse . . . .. . . . .. 503
Modulation Instabilities of Surface· Wave Sustained Discharges
M. Bake, D. Grozev, G. Himmel, K. Kirov, H. Schliiter· and A. Shivamva . 505
Correlation and Spectrum Analysis of Instabilties in Waveguided
Discharges
N. Djermanova and K. Kirov . . . . . . . . . . . . . . . .. . ...... . .. .... 507
Pulsed Surface Wave Sustained Discharges: Modelling
K. Kirov ............................ . . . . 509
Pulsed Discharges Produced by Surface Waves in 3-cm Wavelength Band
in the Air
O.A. Ivanov and V.A. Koldanov. . . . . . . . . . . . . . . . . . . . . . . . . . 511
Pulsed Microwave Discharge in Nitrogen: Diagnostics and Modelling
M. Baeva, X. Luo, B. Pfelzer and J. Uhlenbusch . . ... .... ... ... . .. 513
The Turning Back and the Turning Forward of the Wave Number in
Surface Wave Propagation
J. Henriques and F.M. Dias . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 515
Experimental Indications for the Existence of Plasma Resonances in
Surface Wave Discharges
S. Gmsse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...5 17
Test Surface Waves as a Diagnostics Tool for SWSD
.!. Berndt, D. Grozev, H. Schluter and A. Shivarova . . . ...... 519
Optical Spectroscopy Diagnostics of Waveguided Discharges in a
Non- Stationary Regime
A. Assenova, V. Gagov, K. Kirov, I. Koleva and M. Mihova .. . . 521
A New Passive Compensation Technique for Probes in Oscillating Electric
Fields
S . Grosse and M.N. Georgieva-Grosse ..... . .. . ...... . . . 523
Modelling of Radio Frequency Capacitively Coupled Plasma at
Intermediate Pressures
S . Berezhnoi, I. Kaganovich, A . Bogaerts and R. Gijbels .... ... .... 525
ix
Two- Dimensional Mapping of the Electron Energy Distribution Function
B . G. Heiland U. Kortshagen . . . . . . . . . . . . . . . . . . . . . . . . . . . . 527
Modelling of the Equivalent Circuit of Inductively Coupled Plasma
Sources
P. Colpo and F. Rossi . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 529
Optical Measurements of Gas Temperature in Microwave Discharge
Plasmas in Hydrogen
R.A . Akhmedzhanov and D.B. Radishev . . . . . . . . . . . . . . . . . . . . 531
Gas Temperature Influence on the Particle Kinetics in a Surface -Wave-
Sustained Nitrogen Discharge
E. K. Stoykova . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 533
Excited Atoms and Charged Particles Axial Distributions in Argon
Microwave Plasmas at Various Gas Pressures
E. Benova . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 535
A Study of Excitation Mechanisms in Atmospheric Microwave Induced
Argon Plasmas
E.A.H. Timmermans, I.A.J. Thomas, J. Jonkers and
J.A.M. van der Mullen. . . . . . . . . . . . . . . . . . . . . . . ....... 537
2D Model for a Microwave Sustained Discharge in Nitrogen at
Atmospheric Pressure
J . Staiico . . ..... . .. . . . .. . . .. ... . ... .. . . . . ..... . . . . ... 539
Influence of Ionization Effects on Drift-Dissipative Instability
Zh. Kiss 'ovski . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. . 541
Investigation of the Electron Distribution Functions in Low Pressure
Electron Cyclotron Resonance Discharges
I. K aganovich, M. Misina, A. Bogaerts and R . Gijbels . .. . . . . . .. . . .. 543
Electromagnetic Waves in a Magnetized Plasma Column
S. T . Ivanov, E. T. Benova and K. V. Avramov ...... . . ... . 545
Magnetoplasmons Guided by a Gyrotropic Plasma Layer on a Metal
Substrate
S. T. Ivanov and N.J. Nikolaev .. . ........ ... . . . . .. . . .. . . . . .. 549
Wave Propagation in a Free Gyrotropic Plasma Layer
S. T . Ivanov and N.J. Nikolaev . . . . . . . . . . . . . .. .. . . . . .... , 553
Source of an Annular Controlled Radius Plasma
D.K. Ulyanov, 0. T. Loza, A. V. Ponomarev, P.S . Strelkov and
A. G. Shkvar·unets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 555
