Table Of ContentU.S. Department ofCommerce
Carlos M. Gutierrez, Secretaiy
Technology Administration
Robert Cresanti, UnderSecretaiyofCommercefor Technology
NationalInstitute ofStandards andTechnolog}'
WilliamJeffrey, Director
Certain commercial entities, equipment, or materials maybe identified inthis documentin orderto describe an
experimental procedure or concept adequately. Such identification does not implyrecommendation or
endorsement by the National Institute ofStandards and Technology, nor does it imply that the materials or
equipment used are necessarily the best available for the purpose.
National Institute ofStandards and Technology Special Publication 1052
Natl. Inst. Stand. Technol. Spec. Publ. 1052, 186 pages (August 2006)
CODEN: NSPUE2
NIST Special Publication 1052
Accomplishments
Nanoteciinology
in
Compiled and Edited by:
Michael T. Postek,
Assistant to the Director
for Nanotechnology,
Manufacturing Engineering
Laboratory
Joseph Kopanski,
Program Office
and
David Wollman,
Electronics and Electrical
Engineering Laboratory
U. S. Department of Commerce
Technology Administration
National Institute of Standards and
Technology
Gaithersburg, MD 20899
August 2006
National Institute of Standards and Teclinology • TechnologyAdministration • U.S. DepartmentofCommerce
Acknowledgments
Thanks go to the NIST technical staffforproviding the information outlined on this report.
Each ofthe investigators is identified with their contribution. Contact information can be
obtained by going to:
http://www.nist.gov
Acknowledged as well, is the invaluable assistance and support provided by Mark Bello of
the NIST Public and Business Affairs Office, Thelma Allen, Douglas Smith and Anne Chaka of
the NIST Program Office. Bessmarie (Beamie) Young is also thanked for her contribution to the
design ofthe cover for this document. Mylene Ouimette and Use Putman ofthe NIST
Information Services Division are thanked for their assistance in getting the document prepared
for publishing and GeoffHoldridge ofthe National Nanotechnology Coordination Office and
WTEC
is thanked for his invaluable assistance in document formatting andpreparation.
Table of Contents
Table of Contents
Introduction
1
1 - Fundamental Nanoscale Phenomena and Processes
Nanoscale Science,
Joseph A. Stroscio andDaniel T. Pierce (PL) 5
Nanotechnology with atom optics, Jabez J. McClellandPL) 7
Nanoscale Characterization ofPolymeric Materials Degradation,
Tinh Nguyen, Xiaohong Gu, and Jon Martin (BFRL) 9
Nanomechanical Characterization ofNanoparticle-filled Polymeric Coatings and Composites,
Stephanie Scierka and PeterVotruba-Drzal (BFRI.) 11
Creating Visual Models ofNanoworlds, Judith Devaney (ITL) 13
BrillouinLight Scattering,
WardJohnson, Sudook Kim, ColmFlarmery, andPavel Kabos (MSEL) 15
Nanolithography: Next-Generation PolymerPhotoresists,
VivekM. Prabhu (MSEL) 16
Modeling forOrganic Conduction, Carlos A. Gonzalez (CSTL) 17
Spin Electronics, William H. Rippard and Matthew R. Pufall (EEEL) 19
Nanomagnetodynamics, RobertD. McMichael (MSEL) 21
Nanomagnetism, John Unguris and Mark Stiles (PL) 22
Synthesis, Characterization, and Manipulation ofMagnetic Nanoparticles,
Guangjun Cheng and Angela R. Hight Walker (PL) 24
Nanomagnetodynamics: Fundamental Properties, Thomas J. Silva, (EEEL) 25
Bioelectronics
Michael Gaitan, Darwin Reyes-Hernandez, and Brian Polk, EEEL, Laurie Locascio,
and Sam Forry CSTL 27
Single MoleculeNanovials,
Michael Gaitan EEEL, and Laurie Locascio and Wyatt Vreeland, CSTL 29
Optical Manipulation ofNanocontainers andNanotubes,
William D. Phillips, Kristian Helmerson (PL) 31
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Fundamental Properties ofQuantumDots, Kevin Silverman (EEEL) 33
Multiscale Modeling ofNanostructures, VinodTewaryandDavidRead (MSEL) 35
Designing the Nanoworld: Nanosystems andNanooptics, Gamett W. Bryant (PL) 36
Precision Metrology forNanoscale Quantum Technologies,
John Lawall and Gamett W. Bryant (PL) 38
Control ofCold Quantum Gases forAtomic Clocks andQuantum Information Processing,
Paul S. Julienne and Lite Tiesinga (PL) 40
Quantum Computing withTrappedIons, David Wineland and Tom O'Brian (PL) 42
Neutral Atom Quantum Computation, WilliamD. Phillips, James Porto (PL) 44
2 - Nanomaterials
PolymerMiscibility ofImidazoliumCompatibilizedNanotubes,
Jeffrey Oilman (BFRL) 45
New Materials to Protect Firefighters from Bum Injuries,
Jeffrey Oilman andKuldeep Prasad (BFRL) 46
Characterization andPhotoreactivity ofTitaniumDioxideNanostmctures,
Stephanie Scierka andJoarmie Chin (BFRL) 47
Optical Properties ofCarbonNanotubes, John Lehman (EEEL) 49
Characterization ofSingle Walled CarbonNanotubes, Angela R. Hight Walker (PL) 50
Stability ofNanowires, Geoffrey B. McFadden (ITL) 51
SemiconductorQuantum Dot Structure Metrology, Alexana Roshko (EEEL) 53
Chemistry and Stmcture ofNanomaterials, Daniel A. Fischer (MSEL) 55
Mechanical Metrology for Small-Scale Structures,
Edwin R. Fuller, Jr. and George D. Quinn (MSEL) 56
Highly ChargedIonModified Materials,
Joshua M. Pomeroy andJohn D. Oillaspy (PL) 57
Nanoscale Metrology ofIll-Nitride Semiconductor Films andNanowires,
Norman Sanford and John Schlager (EEEL) 58
Mathematical Modeling ofNanomagnetism,
Michael J. Donahue and Donald O. Porter (ITL) 60
Magnetic Materials ForNanoscale Sensors and Ultra-High Density Data Storage,
WilliamF. Egelhoff, Jr. (MSEL) 62
NIST Accomplishments in Nanotechnology
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3 - Nanoscale Devices and Systems
EvanescentMicrowave ProbingandHigh-resolutionMicrowave Power Imaging,
Michael Janezic, JamesBaker-Jarvis, andPavel Kabos (EEEL) 63
Chemical SensingwithNanowires & Nanotubes, Richard E. Cavicchi (CSTL) 64
III-Nitride SemiconductorNanowires: Growth and Characterization,
Kris Bertness andNorman Sanford (EEEL) 65
Measuring & Understanding Charge Transport in Molecules,
Rogervan Zee, (CSTL) 66
MOS
Device Characterization and Reliability Project,
John S. Suehle and Eric M. Vogel (EEEL) 68
Nanoelectronic Device Metrology Project, CurtA. Richter and Eric M. Vogel (EEEL) 70
Nanomagnetodynamics: Devices, Stephen E. Russek, (EEEL) 72
Nanoscale Engineered Magnetic Sensors,
DavidP. Pappas, (EEEL) 74
Single Photon Sources andDetectors, RichardMirin (EEEL) 76
Terahertz Technology, Erich Grossman and Robert Schwall (EEEL) 78
Nanoscale Fabrication, James Beall (EEEL) 80
JohnsonNoise Thermometry, Wes Tew, Sam Benz, Sae Woo Nam (EEEL) 82
Quantum Communications, Sae Woo Nam (EEEL) 84
Quantum Computing Using Superconducting Phase Qubits, Ray Simmonds (EEEL) 86
Quantum Sensors, KentIrwin (EEEL) 88
Single Electronics for Standards and Metrology,
Mark Kellerand Neil Zimmerman (EEEL) 90
Quantum Voltage Metrology, Samuel Benz andYi-hua Tang (EEEL) 92
Architectures forFault-tolerant Quantum Computing, Emanuel Knill (ITL) 94
Synthesis ofQuantum Logic Circuits, Stephen S. Bullock (ITL) 96
Quantitative single-molecularpair fluorescence resonance, Lori S. Goldner(PL) 98
Bacteriophage/Quantum-dot nanocomplex to detect biological target
in clinical or environmental isolates, Jeeseong Hwang (PL) 100
NIST Accomplishments in Nanotechnology
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Table of Contents
4- Instrumentation Research, Metrology and Standards for Nanotechnology
Chemical Sensor Microscopy forNanotechnology,
TinhNguyen andXiaohong Gu (BFRL) 101
Nanomechanical Properties ofPolymerThin Films, Christopher M. Stafford (MSEL) 103
Nanomechanical Metrology, Douglas T. Smith andLyle E. Levine (MSEL) 104
Improving Image Resolution inNanotechnology, AlfredCarasso (ITL) 105
Optical Metrology forNanolithography,
John H. Burnett, Simon G. Kaplan, and Eric L. Shirley (PL) 107
True Three-Dimensional Tomography Utilizing Bayesian Statistical Inference,
Donald Malec and Juan Soto (ITL) 109
Structure and Dispersion Measurements ofPolymeric Building Materials,
Li-Piin Sung (BFRL) Ill
Synthetic X-ray Spectrum Images for 3D Chemical Imaging at theNanoscale,
John HenryJ. Scott andNicholas Ritchie (CSTL) 113
CarbonNanotube Metrology, Paul Rice andTammy Oreskovic (MSEL) 115
Nanotribology and Surface Properties, Stephen Hsu (MSEL) 116
Neutron Reflectometry for Highly AccurateNanometerMetrology,
Joseph A. Dura (MSEL) 117
Gradient Reference Specimens forAdvanced Scanned Probe Microscopy,
Michael J. Fasolka and Duangrut Julthongpiput (MSEL) 118
QuantitativeNanomechanical Properties, Donna C. Hurley (MSEL) 119
Highly Charged Ions in EUV Lithography, JohnD. Gillaspy andJoshuaM. Pomeroy (PL) 120
Electrical Test Structure Metrology, Michael Cresswell and Richard Allen (EEEL) 122
MolecularNanomagnets, Brant Cage and Stephen E. Russek, (EEEL) 124
Nanomagnetic Measurements, John Moreland, (EEEL) 126
Nanoparticle Measurements forBiological Applications, John Moreland, (EEEL) 128
Imaging Methods forNanoparticle andCell Systems to Investigate Toxicity,
Cynthia J. Zeisslerand PeterE. Barker (CSTL) 130
NIST Accomplishments in Nanotechnology
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5 - Nanomanufacturing
DevelopmentofHigh-resolution Variable Pressure Reference Scanning Electron Microscope,
Andras E. Vladar, Michael T. Postek andJohn S. Villarrubia (MEL) 133
Scanning Probe Microscopy forNanoscale Measurements,
RonaldDixson, Joseph Fu, George Orji, and Theodore Vorburger(MEL) 135
Scanning Probe Microscopy forNanoscale Measurements: Atom-Based Height Standards,
Joseph Fu, Ronald Dixson, George Orji, and Theodore Vorburger(MEL) 137
Atom-BasedDimensional Metrology, Rick Silver(MEL) 139
Critical Dimension Metrologyusing Scanning Electron Microscopy and a Model-Based Library,
John S. Villarrubia and Andras E. Vladar (MEL) 141
SI traceable force for scanningprobe microscopy and instrumented indentation,
Jon R. Pratt (MEL) 143
Phase-sensitive ScatterfieldOptical Imaging for sub-10 nm Dimensional Metrology,
Rick Silver(MEL) 145
Advanced Control Systems and Positioning forNanoscale Measurements and Standards,
Nicholas G. Dagalakis (MEL) 147
MolecularMeasuring Machine, John A. Kramar (MEL) 149
AgileNanoassemblyto Prototype, Test, and Manufacture FunctionalNanodevices,
Thomas W. LeBrun (MEL) 151
Development ofNano-tip Electron Guns forthe Scaiming ElectronMicroscope,
Andras E. VladarandMichael T. Postek (MEL) 153
Measurement Strategy forLine Edge andLinewidth Roughness Metrology,
John S. VillarrubiaandAndras E. Vladar(MEL) 155
Combinatorial Metal Selection forCatalytic Growth ofZnO SemiconductorNanowires,
AlbertV. Davydov (MSEL) 157
Electrical Properties ofOn-Chip Intercoimections, Daniel Josell and T.P. Moffat(MSEL) 158
Horizontal Growth and In Situ AssemblyofOriented SemiconductorNanowires,
BabakNikoobakht and Stephan J. Stranick (CSTL) 159
Organic Electronics, Eric K. Lin (MSEL) 161
NIST Accomplishments in Nanotechnology
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6 - Major Research Facilities and Instrumentation Acquisition
The NIST Advanced Measurement LaboratoryNanofab,
Robert Celotta (CNST), Russ Hajdaj (CNST) and Eric M. Vogel (EEEL) 163
ProbingNanoscale Disorderwith Neutron Tunnehng Spectroscopy,
Robert M. Dimeo and Dan A. Neumann (MSEL) 164
Probing the Nanostructure ofLipid Membranes with the AND/R (AdvancedNeutron
Diffractometer/Reflectometer), M. Mihailescu and David Worcester (MSEL) 165
Appendix
1
Cross Reference toNISTNanotechnologyFocus Areas 167
Appendix 2
Key Words 173
NIST Accomplishments Nanotechnology
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