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About MEMS
The document discusses microelectromechanical systems (MEMS) and microfabrication techniques. It describes complex microscale devices such as gears, motors, and steam engines that are entirely fabricated using MEMS methods. The document explains that microfabrication uses techniques such as depositing materials on silicon wafers and etching away parts of the deposited materials to leave only the desired microscale patterns and structures.
Detailed Information
| Author: | ['chau'] |
|---|---|
| Publication Year: | 2017 |
| Pages: | 55 |
| Language: | English |
| Format: | |
| Price: | FREE |
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