Table Of Content(cid:2)
DESIGN AND
IMPLEMENTATION
OF LARGE-RANGE
COMPLIANT
MICROPOSITIONING
SYSTEMS
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(cid:2)
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DESIGN AND
IMPLEMENTATION
OF LARGE-RANGE
COMPLIANT
MICROPOSITIONING
SYSTEMS
(cid:2) QingsongXu (cid:2)
UniversityofMacau,China
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Thiseditionfirstpublished2016
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LibraryofCongressCataloging-in-PublicationData
Names:Xu,Qingsong,1978-author.
Title:Designandimplementationoflarge-rangecompliantmicropositioning
systems/QingsongXu.
Description:Singapore:JohnWiley&SonsInc.,[2016]|Includes
bibliographicalreferencesandindex.
Identifiers:LCCN2016015350|ISBN9781119131434(cloth)|ISBN9781119131465
(AdobePDF)|ISBN9781119131458(epub)|ISBN9781119131441(oBook)
Subjects:LCSH:Micropositioners.
Classification:LCCTJ223.P67X8252016|DDC629.8/95–dc23LCrecordavailableat
https://lccn.loc.gov/2016015350
AcataloguerecordforthisbookisavailablefromtheBritishLibrary.
Typesetin10/12ptTimesLTStdbySPiGlobal,Chennai,India
10987654321
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To Professor Wei Zhao and my family, for their constant encouragement
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Contents
Preface xiii
Acknowledgments xvii
1 Introduction 1
1.1 MicropositioningTechniques 1
1.2 CompliantGuidingMechanisms 2
1.2.1 BasicFlexureHinges 2
1.2.2 TranslationalFlexureHinges 3
1.2.3 TranslationalPositioningMechanisms 4
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1.2.4 RotationalPositioningMechanisms 8
1.2.5 Multi-StrokePositioningMechanisms 10
1.3 ActuationandSensing 11
1.4 ControlIssues 12
1.5 BookOutline 14
References 14
PartI LARGE-RANGETRANSLATIONALMICROPOSITIONING
SYSTEMS
2 UniaxialFlexureStage 21
2.1 ConceptofMCPF 21
2.1.1 LimitationofConventionalFlexures 21
2.1.2 ProposalofMCPF 23
2.2 DesignofaLarge-RangeFlexureStage 25
2.2.1 MechanismDesign 25
2.2.2 AnalyticalModeling 26
2.2.3 ArchitectureOptimization 29
2.2.4 StructureImprovement 31
2.3 PrototypeDevelopmentandPerformanceTestings 33
2.3.1 StaticsPerformanceTesting 34
2.3.2 DynamicsPerformanceTesting 35
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viii Contents
2.4 SlidingModeControllerDesign 35
2.4.1 DynamicsModeling 35
2.4.2 DSMCDesign 36
2.5 ExperimentalStudies 38
2.5.1 PlantModelIdentification 38
2.5.2 ControllerSetup 39
2.5.3 Set-PointPositioningResults 39
2.5.4 SinusoidalPositioningResults 41
2.6 Conclusion 42
References 44
3 XYFlexureStage 45
3.1 Introduction 45
3.2 XYStageDesign 46
3.2.1 DecoupledXYStageDesignwithMCPF 46
3.2.2 Buckling/BendingEffectConsideration 49
3.2.3 ActuationIssues 51
3.3 ModelVerificationandPrototypeDevelopment 52
3.3.1 PerformanceAssessmentwithFEASimulation 52
3.3.2 PrototypeFabrication 54
3.3.3 Open-LoopExperimentalResults 54
3.4 EMPCControlSchemeDesign 55
3.4.1 ProblemFormulation 56
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3.4.2 EMPCSchemeDesign 57
3.4.3 StateObserverDesign 60
3.4.4 TrackingErrorAnalysis 61
3.5 SimulationandExperimentalStudies 61
3.5.1 PlantModelIdentification 61
3.5.2 ControllerParameterDesign 64
3.5.3 SimulationStudiesandDiscussion 64
3.5.4 ExperimentalResultsandDiscussion 66
3.6 Conclusion 67
References 69
4 Two-LayerXYFlexureStage 70
4.1 Introduction 70
4.2 MechanismDesign 71
4.2.1 DesignofaTwo-LayerXYStagewithMCPF 71
4.2.2 StructureImprovementoftheXYStage 72
4.3 ParametricDesign 73
4.3.1 MotionRangeDesign 73
4.3.2 StiffnessandActuationForceDesign 74
4.3.3 CriticalLoadofBuckling 75
4.3.4 ResonantFrequency 75
4.3.5 Out-of-PlanePayloadCapability 76
4.3.6 InfluencesofManufacturingTolerance 77
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Contents ix
4.4 ExperimentalStudiesandResults 79
4.4.1 PrototypeDevelopment 80
4.4.2 StaticsPerformanceTesting 80
4.4.3 DynamicsPerformanceTesting 81
4.4.4 PositioningPerformanceTesting 83
4.4.5 ContouringPerformanceTesting 84
4.4.6 ControlBandwidthTesting 86
4.4.7 DiscussionandFutureWork 88
4.5 Conclusion 89
References 89
PartII MULTI-STROKETRANSLATIONALMICROPOSITIONING
SYSTEMS
5 Dual-StrokeUniaxialFlexureStage 93
5.1 Introduction 93
5.2 MechanismDesignandAnalysis 94
5.2.1 MechanismDesigntoMinimizeInterferenceBehavior 94
5.2.2 MechanismDesigntoAchieveLargeStroke 99
5.2.3 FEASimulationandDesignImprovement 101
5.3 PrototypeDevelopmentandOpen-LoopTesting 104
5.3.1 ExperimentalSetup 106
(cid:2) 5.3.2 StaticsPerformanceTesting 106 (cid:2)
5.3.3 DynamicsPerformanceTesting 107
5.4 ControllerDesignandExperimentalStudies 109
5.4.1 ControllerDesign 109
5.4.2 ExperimentalStudies 110
5.5 Conclusion 111
References 113
6 Dual-Stroke,Dual-ResolutionUniaxialFlexureStage 114
6.1 Introduction 114
6.2 ConceptualDesign 115
6.2.1 DesignofaCompliantStagewithDualRanges 115
6.2.2 DesignofaCompliantStagewithDualResolutions 116
6.3 MechanismDesign 117
6.3.1 StiffnessCalculation 118
6.3.2 MotionRangeDesign 119
6.3.3 MotorStrokeandDrivingForceRequirement 120
6.3.4 SensorDeployment 121
6.4 PerformanceEvaluation 123
6.4.1 AnalyticalModelResults 123
6.4.2 FEASimulationResults 124
6.5 PrototypeDevelopmentandExperimentalStudies 125
6.5.1 PrototypeDevelopment 126
6.5.2 StaticsPerformanceTesting 127
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6.5.3 DynamicsPerformanceTesting 129
6.5.4 FurtherDiscussion 131
6.6 Conclusion 133
References 133
7 Multi-Stroke,Multi-ResolutionXYFlexureStage 135
7.1 Introduction 135
7.2 ConceptualDesign 136
7.2.1 DesignofFlexureStagewithMultipleStrokes 136
7.2.2 DesignofFlexureStagewithMultipleResolutions 138
7.3 Flexure-BasedCompliantMechanismDesign 139
7.3.1 CompliantElementSelection 139
7.3.2 DesignofaTwo-AxisStage 140
7.4 ParametricDesign 141
7.4.1 DesignofMotionStrokes 141
7.4.2 DesignofCoarse/FineSensorResolutionRatio 144
7.4.3 ActuationIssueConsideration 145
7.5 StagePerformanceAssessment 146
7.5.1 AnalyticalModelEvaluationResults 146
7.5.2 FEASimulationResults 146
7.6 PrototypeDevelopmentandExperimentalStudies 149
7.6.1 PrototypeDevelopment 149
7.6.2 StaticsPerformanceTesting 150
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7.6.3 DynamicsPerformanceTesting 154
7.6.4 CircularContouringTesting 156
7.6.5 Discussion 156
7.7 Conclusion 159
References 159
PartIII LARGE-RANGEROTATIONALMICROPOSITIONINGSYSTEMS
8 RotationalStagewithLinearDrive 163
8.1 Introduction 163
8.2 DesignofMCRF 164
8.2.1 LimitationofConventionalRadialFlexures 164
8.2.2 ProposalofMCRF 165
8.2.3 AnalyticalModels 166
8.3 DesignofaRotaryStagewithMCRF 169
8.3.1 ConsiderationofActuationIssues 170
8.3.2 ConsiderationofSensingIssues 172
8.4 PerformanceEvaluationwithFEASimulation 172
8.4.1 AnalyticalModelResults 172
8.4.2 FEASimulationResults 173
8.4.3 StructureImprovement 175
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Contents xi
8.5 PrototypeDevelopmentandExperimentalStudies 176
8.5.1 PrototypeDevelopment 176
8.5.2 Open-LoopPerformanceTesting 177
8.5.3 ControllerDesignandClosed-LoopPerformanceTesting 178
8.5.4 FurtherDiscussion 181
8.6 Conclusion 183
References 184
9 RotationalStagewithRotaryDrive 185
9.1 Introduction 185
9.2 NewDesignofMCRF 186
9.2.1 MCRFDesign 186
9.2.2 AnalyticalModelNotConsideringDeformation 187
9.2.3 AnalyticalModelConsideringDeformation 189
9.3 DesignoftheRotaryStage 192
9.3.1 ActuatorSelection 194
9.3.2 SensorDesign 194
9.4 PerformanceEvaluationwithFEASimulation 196
9.4.1 AnalyticalModelResults 197
9.4.2 FEASimulationResults 197
9.5 PrototypeFabricationandExperimentalTesting 201
9.5.1 PrototypeDevelopment 201
9.5.2 StaticsPerformanceTesting 202
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9.5.3 DynamicsPerformanceTesting 206
9.5.4 Discussion 206
9.6 Conclusion 207
References 208
PartIV APPLICATIONSTOCOMPLIANTGRIPPERDESIGN
10 Large-RangeRotaryGripper 213
10.1 Introduction 213
10.1.1 StructureDesignandDrivingMethod 213
10.1.2 SensingRequirements 214
10.2 MechanismDesignandAnalysis 216
10.2.1 ActuationIssues 216
10.2.2 PositionandForceSensingIssues 218
10.3 PerformanceEvaluationwithFEASimulation 222
10.3.1 AnalyticalModelResults 222
10.3.2 FEASimulationResults 222
10.4 PrototypeDevelopmentandCalibration 227
10.4.1 PrototypeDevelopment 227
10.4.2 CalibrationofPositionSensor 228
10.4.3 CalibrationofForceSensor 229
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xii Contents
10.4.4 VerificationofForceSensor 230
10.4.5 ConsistencyTestingoftheSensors 231
10.5 PerformanceTestingResults 232
10.5.1 TestingofGrippingSensingPerformance 232
10.5.2 TestingofHorizontalInteractionDetection 235
10.5.3 TestingofVerticalInteractionDetection 236
10.5.4 TestingofDynamicsPerformance 237
10.5.5 ApplicationstoPick–Transport–PlaceinAssembly 238
10.5.6 FurtherDiscussion 239
10.6 Conclusion 242
References 242
11 MEMSRotaryGripper 244
11.1 Introduction 244
11.2 MEMSGripperDesign 245
11.2.1 ActuatorDesign 246
11.2.2 SensorDesign 249
11.3 PerformanceEvaluationwithFEASimulation 251
11.3.1 StaticsAnalysis 252
11.3.2 DynamicsAnalysis 254
11.4 GripperFabrication 254
11.5 ExperimentalResultsandDiscussion 255
11.5.1 GrippingRangeTestingResults 255
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11.5.2 GrippingForceTestingResults 258
11.5.3 InteractionForceTestingResults 260
11.5.4 DemonstrationofMicro-objectGripping 261
11.5.5 FurtherDiscussion 262
11.6 Conclusion 264
References 266
Index 267
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